Amy E. Zweber, Ph.D.
Affiliations: | 2007 | North Carolina State University, Raleigh, NC |
Area:
Chemical Engineering, Electronics and Electrical EngineeringGoogle:
"Amy Zweber"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| Ruben G. Carbonell | grad student | 2007 | NCSU | |
| (Enhancement of the lithographic process using supercritical carbon dioxide in the development step.) | ||||
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Publications
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| Zweber AE, Wagner M, Carbonell RG. (2009) Sorption of CO2 and a CO2 compatible salt into an extreme ultraviolet photoresist film on a SiO2 substrate. The Journal of Physical Chemistry. B. 113: 9687-93 |
| Zweber AE, Wagner M, DeYoung J, et al. (2009) Mechanism of extreme ultraviolet photoresist development with a supercritical CO2 compatible salt. Langmuir : the Acs Journal of Surfaces and Colloids. 25: 6176-90 |
| Zweber AE, Wagner M, Carbonell RG. (2007) Photoresist dissolution into a CO 2 compatible salt and CO 2 solution: Investigation of processing conditions Proceedings of Spie - the International Society For Optical Engineering. 6519 |
| Zweber AE, Carbonell RG. (2006) Monitoring photoresist dissolution in supercritical carbon dioxide using a quartz crystal microbalance Proceedings of Spie - the International Society For Optical Engineering. 6153 |
| Zweber AE, DeSimone JM, Carbonell RG. (2005) Enhancement of lithography processes using Co2: Co 2-modifled development and post applied bake Aiche Annual Meeting, Conference Proceedings. 5007 |
| Jones CA, Zweber A, DeYoung JP, et al. (2004) Applications of "dry" processing in the microelectronics industry using carbon dioxide Critical Reviews in Solid State and Materials Sciences. 29: 97-109 |