Matthew T. Spuller, Ph.D.

Affiliations: 
2003 Georgia Institute of Technology, Atlanta, GA 
Area:
Chemical Engineering
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Parents

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Dennis W. Hess grad student 2003 Georgia Tech
 (Resist and residue removal using gas -expanded liquids.)
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Publications

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Spuller MT, Perchuk RS, Hess DW. (2005) Evaluating Photoresist Dissolution, Swelling, and Removal with an In Situ Film Refractive Index and Thickness Monitor Journal of the Electrochemical Society. 152: G40
Spuller MT, Hess DW. (2003) Incomplete Wetting of Nanoscale Thin-Film Structures Journal of the Electrochemical Society. 150
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