Matthew T. Spuller, Ph.D.
Affiliations: | 2003 | Georgia Institute of Technology, Atlanta, GA |
Area:
Chemical EngineeringGoogle:
"Matthew Spuller"Mean distance: (not calculated yet)
Parents
Sign in to add mentorDennis W. Hess | grad student | 2003 | Georgia Tech | |
(Resist and residue removal using gas -expanded liquids.) |
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Publications
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Spuller MT, Perchuk RS, Hess DW. (2005) Evaluating Photoresist Dissolution, Swelling, and Removal with an In Situ Film Refractive Index and Thickness Monitor Journal of the Electrochemical Society. 152: G40 |
Spuller MT, Hess DW. (2003) Incomplete Wetting of Nanoscale Thin-Film Structures Journal of the Electrochemical Society. 150 |