Michael D. Stewart
Affiliations: | 2003 | University of Texas at Austin, Austin, Texas, U.S.A. |
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Parents
Sign in to add mentor| C. Grant Willson | grad student | 2003 | UT Austin | |
| (Catalyst diffusion in positive -tone chemically amplified photoresists.) | ||||
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Publications
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| Schmid GM, Stewart MD, Wetzel J, et al. (2006) Implementation of an imprint damascene process for interconnect fabrication Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 1283-1291 |
| Dickey DA, Dickey MD, Stewart MD, et al. (2006) An Automated Statistical Process Control Study of Inline Mixing Using Spectrophotometric Detection Journal of Chemical Education. 83: 110-113 |
| Gates BD, Xu Q, Stewart M, et al. (2005) New approaches to nanofabrication: molding, printing, and other techniques. Chemical Reviews. 105: 1171-96 |
| Nishimura Y, Michaelson TB, Meiring JE, et al. (2005) Line edge roughness in chemically amplified resist: Speculation, simulation and application Journal of Photopolymer Science and Technology. 18: 457-465 |
| Stewart MD, Willson CG. (2005) Imprint Materials for Nanoscale Devices Mrs Bulletin. 30: 947-951 |
| Stewart MD, Johnson SC, Sreenivasan SV, et al. (2005) Nanofabrication with step and flash imprint lithography Journal of Micro-Nanolithography Mems and Moems. 4: 11002 |
| Kim EK, Stewart MD, Wu K, et al. (2005) Vinyl ether formulations for step and flash imprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23: 2967-2971 |
| Tsiartas PC, Schmid GM, Johnson HF, et al. (2005) Quantifying acid generation efficiency for photoresist applications Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23: 224-228 |
| Schmid GM, Stewart MD, Burns SD, et al. (2004) Mesoscale Monte Carlo Simulation of Photoresist Processing Journal of the Electrochemical Society. 151: G155-G161 |
| Jones RL, Hu T, Lin EK, et al. (2004) Formation of deprotected fuzzy blobs in chemically amplified resists Journal of Polymer Science, Part B: Polymer Physics. 42: 3063-3069 |