Kenneth A. Honer, Ph.D.
Affiliations: | 2001 | Stanford University, Palo Alto, CA |
Google:
"Kenneth Honer"Parents
Sign in to add mentorGregory T. A. Kovacs | grad student | 2001 | Stanford | |
(Surface micromachining techniques for integrated microsystems.) |
BETA: Related publications
See more...
Publications
You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect. |
Honer KA, Kovacs GTA. (2001) Integration of sputtered silicon microstructures with pre-fabricated CMOS circuitry Sensors and Actuators, a: Physical. 90: 386-397 |