☰

Qiaolin Zhang, Ph.D.

Affiliations: 
2006 University of California, Berkeley, Berkeley, CA, United States 
Area:
Control, Intelligent Systems, and Robotics (CIR), System identification; Design, Modeling and Analysis (DMA), Design for Manufacturability; Physical Electronics (PHY), Semiconductor Manufacturing
Google:
"Qiaolin Zhang"
Cross-listing: Robotree

Tree Publications Similar researchers PubMed Report error

Parents

Sign in to add mentor
Kameshwar Poolla grad student 2006 UC Berkeley
 (IC manufacturing performance enhancement through advanced process/equipment modeling, control and metrology.)

Children

Sign in to add trainee

Collaborators

Sign in to add collaborator
BETA: Related publications

Publications

You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect.

Zhang Q, Poolla K, Spanos CJ. (2008) One step forward from run-to-run critical dimension control: Across-wafer level critical dimension control through lithography and etch process Journal of Process Control. 18: 937-945
Zhang Q, Tang C, Cain J, et al. (2007) Across-wafer CD uniformity control through lithography and etch process: Experimental verification Proceedings of Spie - the International Society For Optical Engineering. 6518
Zhang Q, Poolla K, Spanos CJ. (2007) Across wafer critical dimension uniformity enhancement through lithography and etch process sequence: Concept, approach, modeling, and experiment Ieee Transactions On Semiconductor Manufacturing. 20: 488-505
See more...