Justin Ghan, Ph.D.
Affiliations: | 2010 | Mechanical Engineering | University of California, Berkeley, Berkeley, CA, United States |
Area:
Control, Intelligent Systems, and Robotics (CIR), System identification; Design, Modeling and Analysis (DMA), Design for Manufacturability; Physical Electronics (PHY), Semiconductor ManufacturingGoogle:
"Justin Ghan"Cross-listing: Robotree
Parents
Sign in to add mentor| Kameshwar Poolla | grad student | 2010 | UC Berkeley | |
| (Distance metrics and clustering algorithms for detection and classification of process sensitive patterns.) | ||||
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Publications
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| Neureuther AR, Rubinstein J, Miller M, et al. (2011) Collaborative research on emerging technologies and design Proceedings of Spie - the International Society For Optical Engineering. 8081 |
| Bubke K, Ruhm M, Aldana R, et al. (2011) Simulation-based scanner tuning using FlexRay capability and scatterometry Proceedings of Spie - the International Society For Optical Engineering. 7973 |
| Bekaert J, Van Look L, D'Havé K, et al. (2011) Scanner matching for standard and freeform illumination shapes using FlexRay Proceedings of Spie - the International Society For Optical Engineering. 7973 |
| Ghan J, Ma N, Mishra S, et al. (2009) Clustering and pattern matching for an automatic hotspot classification and detection system Proceedings of Spie - the International Society For Optical Engineering. 7275 |
| Ghan J, Sezginer A. (2009) Algorithm for determining printability and colouring of a target layout for double patterning Proceedings of Spie - the International Society For Optical Engineering. 7275 |
| Ma N, Ghan J, Mishra S, et al. (2008) Automatic hotspot classification using pattern-based clustering Proceedings of Spie - the International Society For Optical Engineering. 6925 |