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Jing Xue, Ph.D.

Affiliations: 
2009 University of California, Berkeley, Berkeley, CA, United States 
Area:
Energy (ENE); Integrated Circuits (INC); Physical Electronics (PHY); Semiconductor manufacturing; Solid-State Devices
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"Jing Xue"
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Costas J. Spanos grad student 2009 UC Berkeley
 (In-situ, portable monitoring methods for photolithography characterization.)

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Publications

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Zhang XQ, Pu C, Zhao X, et al. (2016) Tillage effects on carbon footprint and ecosystem services of climate regulation in a winter wheat-summer maize cropping system of the North China Plain Ecological Indicators. 67: 821-829
Xue J, Spanos CJ, Neureuther AR. (2008) Probe-pattern grating focus monitor through scatterometry calibration Proceedings of Spie - the International Society For Optical Engineering. 6922
Ben Y, Xue J, Spanos CJ. (2008) Using composite gratings for optical system characterization through scatterometry Proceedings of Spie - the International Society For Optical Engineering. 6925
Xue J, Moen K, Spanos CJ. (2006) Integrated aerial image sensor: Design, modeling, and assembly Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 3088-3093
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