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Eric J. Klein, Ph.D.

Affiliations: 
2000 University of Colorado, Boulder, Boulder, CO, United States 
Area:
Chemical Engineering
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W Fred Ramirez grad student 2000 CU Boulder
 (Identification and etch depth control of an ion milling process.)

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Publications

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Klein EJ, Ramirez WF. (2002) Optimal Parameter Estimation for the Online Control of Ion Milling Etch Depth Aiche Journal. 48: 311-323
Klein EJ, Ramirez WF. (2001) State controllability and optimal regulator control of time-delayed systems International Journal of Control. 74: 281-289
Klein EJ, Ramirez WF, Hall JL. (2001) A common-path heterodyne interferometer for surface profiling in microelectronic fabrication Review of Scientific Instruments. 72: 2455-2466
Klein EJ, Rivera SL, Porter JE. (2000) Optimization of ion-exchange protein separations using a vector quantizing neural network. Biotechnology Progress. 16: 506-12
Klein EJ. (2000) Consideration of local shadowing and ion beam voltage effects in the prediction of a surface evolving under ion milling Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 166-175
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