Yasa A. Sampurno, Ph.D.
Affiliations: | 2008 | Chemical Engineering | University of Arizona, Tucson, AZ |
Area:
Chemical EngineeringGoogle:
"Yasa Sampurno"Parents
Sign in to add mentor| Ara Philipossian | grad student | 2008 | University of Arizona | |
| (Fundamental consumables characterization of advanced dielectric and metal chemical mechanical planarization processes.) | ||||
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Publications
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| Mariscal JC, Dadashazar H, McAllister J, et al. (2020) Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization Japanese Journal of Applied Physics. 59 |
| Philipossian R, Sampurno Y, Philipossian A. (2020) Determining instantaneous removal rates in metal chemical mechanical planarization Japanese Journal of Applied Physics. 59: SL0803 |
| Mariscal JC, McAllister J, Sampurno Y, et al. (2020) Tribological, Thermal and Kinetic Characterization of SiO2 and Si3N4 Polishing for STI CMP on Blanket and Patterned Wafers Ecs Journal of Solid State Science and Technology. 9: 44008 |
| McAllister J, Mariscal JC, Dadashazar H, et al. (2020) Effect of Abrasive Nanoparticle Concentration on the Tribological, Thermal and Kinetic Attributes of Tungsten Chemical Mechanical Planarization Ecs Journal of Solid State Science and Technology. 9: 24014 |
| Mariscal JC, Sampurno Y, Slutz D, et al. (2020) Effect of various CVD-coated conditioning disc designs and polisher kinematics on fluid flow characteristics during CMP Ecs Journal of Solid State Science and Technology. 9: 24005 |
| McAllister J, Stuffle C, Sampurno Y, et al. (2019) Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO Chemical Mechanical Planarization Performance. Micromachines. 10 |
| Frank C, Headley R, Sampurno Y, et al. (2019) Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Steady-State Conditions Ecs Journal of Solid State Science and Technology. 9: 24012 |
| Mariscal JC, McAllister J, Sampurno Y, et al. (2019) Insights into Tungsten Chemical Mechanical Planarization: Part III. Mini-Marathons and Associated Numerical Simulations Ecs Journal of Solid State Science and Technology. 8: P3190-P3194 |
| Headley R, Frank C, Sampurno Y, et al. (2019) Correlating Coefficient of Friction and Shear Force to Platen Motor Current in Tungsten and Interlayer Dielectric Chemical Mechanical Planarization at Highly Non-Steady-State Conditions Ecs Journal of Solid State Science and Technology. 9: 44003 |
| Mariscal JC, McAllister J, Sampurno Y, et al. (2019) Insights into tungsten chemical mechanical planarization: Part II. Effect of pad surface micro-texture on frictional, thermal and kinetic aspects of the process Ecs Journal of Solid State Science and Technology. 8: 3175 |