Yubo Jiao, Ph.D.
Affiliations: | 2012 | Chemical Engineering | University of Arizona, Tucson, AZ |
Area:
Chemical EngineeringGoogle:
"Yubo Jiao"Parents
Sign in to add mentor| Ara Philipossian | grad student | 2012 | University of Arizona | |
| (Wear and contact phenomena in existing and future large-scale chemical mechanical planarization processes.) | ||||
BETA: Related publications
See more...
Publications
|
You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect. |
| Mu Y, Jiao Y, Sampurno Y, et al. (2015) Effect of temperature in titanium chemical mechanical planarization Japanese Journal of Applied Physics. 54 |
| Wu C, Sampurno Y, Liao X, et al. (2015) Pad surface thermal management during copper chemical mechanical planarization Ecs Journal of Solid State Science and Technology. 4: P206-P212 |
| Wu C, Zhuang Y, Liao X, et al. (2013) Aggressive diamond characterization and wear analysis during chemical mechanical planarization Ecs Journal of Solid State Science and Technology. 2 |
| Jiao Y, Zhuang Y, Wei X, et al. (2012) Pad wear analysis during interlayer dielectric chemical mechanical planarization Ecs Journal of Solid State Science and Technology. 1 |
| Jiao Y, Sampurno YA, Zhuang Y, et al. (2011) Tribological, thermal, and kinetic characterization of 300-mm copper chemical mechanical planarization process Japanese Journal of Applied Physics. 50 |
| Meled A, Zhuang Y, Sampurno YA, et al. (2011) Analysis of a novel slurry injection system in chemical mechanical planarization Japanese Journal of Applied Physics. 50 |
| Jiao Y, Zhuang Y, Han Z, et al. (2010) Effect of temperature on pad surface contact area in chemical mechanical planarization Advanced Metallization Conference (Amc). 286-287 |