Harpreet S. Juneja, Ph.D.
Affiliations: | 2008 | Chemical Engineering | University of Arizona, Tucson, AZ |
Area:
Chemical EngineeringGoogle:
"Harpreet Juneja"Parents
Sign in to add mentor| Farhang Shadman | grad student | 2008 | University of Arizona | |
| (Removal of adsorbed moisture and organics from surfaces and nanostructures in semiconductor manufacturing.) | ||||
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Publications
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| Juneja HS, Yao J, Shadman F. (2009) Effect of sampling line characteristics on the dynamic monitoring of fluid concentrations Industrial and Engineering Chemistry Research. 48: 5481-5488 |
| Yao J, Iqbal A, Juneja H, et al. (2007) Moisture uptake and outgassing in patterned and capped porous low- k dielectric films Journal of the Electrochemical Society. 154 |
| Juneja HS, Iqbal A, Yao J, et al. (2006) Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids Industrial and Engineering Chemistry Research. 45: 6585-6593 |
| Iqbal A, Juneja H, Yao J, et al. (2006) Removal of moisture contamination from porous polymeric low-k dielectric films Aiche Journal. 52: 1586-1593 |