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Kelly M. Thom, Ph.D.

Affiliations: 
2009 Chemical Engineering University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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John G. Ekerdt grad student 2009 UT Austin
 (Growth and characterization of ruthenium films deposited by chemical vapor deposition: Towards enhanced nucleation and film properties.)

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Thom KM, Ekerdt JG. (2009) The effect of an iodine source on nucleation and film properties of Ru films deposited by chemical vapor deposition Thin Solid Films. 518: 36-42
Thom KM, Ekerdt JG. (2009) Surface chemistry of (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)Ru on polycrystalline Ta Surface Science. 603: 921-932
Ekerdt J, Shin J, Winkenwerder W, et al. (2007) Chemical routes to ultra thin films for copper barriers and liners Materials Research Society Symposium Proceedings. 990: 93-94
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