Jianfeng Luo, Ph.D.
Affiliations: | 2003 | University of California, Berkeley, Berkeley, CA, United States |
Area:
Mechanical Engineering, Electronics and Electrical Engineering, Materials Science EngineeringGoogle:
"Jianfeng Luo"Parents
Sign in to add mentor| David A Dornfeld | grad student | 2003 | UC Berkeley | |
| (Integrated modeling of chemical mechanical planarization /polishing (CMP) for integrated circuit fabrication: From particle scale to die and wafer scales.) | ||||