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Ndubuisi G. Orji, Ph.D.

Affiliations: 
2004 University of North Carolina, Charlotte, Charlotte, NC, United States 
Area:
Mechanical Engineering
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"Ndubuisi Orji"
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Jay Raja grad student 2004 UNC Charlotte
 (Scanning probe metrology of semiconductor line edge roughness.)

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Publications

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Orji NG, Dixson RG, Lopez E, et al. (2020) Wear comparison of critical dimension-atomic force microscopy tips. Journal of Micro/Nanolithography, Mems, and Moems : Jm3. 19
Dixson R, Orji N, Misumi I, et al. (2018) Spatial dimensions in atomic force microscopy: Instruments, effects, and measurements. Ultramicroscopy. 194: 199-214
Dixson RG, Orji NG. (2017) Multiple-instrument evaluation of the consistency and long-term stability of tip width calibration for critical dimension atomic force microscopy Journal of Micro-Nanolithography Mems and Moems. 16: 24003-24003
Choi J, Park BC, Ahn SJ, et al. (2016) Evaluation of carbon nanotube probes in critical dimension atomic force microscopes. Journal of Micro/Nanolithography, Mems, and Moems : Jm3. 15: 034005
Dixson RG, Orji NG, Goldband RS. (2016) Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit. Journal of Micro/Nanolithography, Mems, and Moems : Jm3. 15
Orji NG, Dixson RG, Garcia-Gutierrez DI, et al. (2016) Transmission electron microscope calibration methods for critical dimension standards Journal of Micro-Nanolithography Mems and Moems. 15: 44002-44002
Dixson RG, Guthrie WF, Allen RA, et al. (2016) Process optimization for lattice-selective wet etching of crystalline silicon structures Journal of Micro/ Nanolithography, Mems, and Moems. 15
Dixson RG, Orji NG, Goldband RS. (2016) Lateral tip control effects in critical dimension atomic force microscope metrology: The large tip limit Journal of Micro/ Nanolithography, Mems, and Moems. 15
Orji NG, Itoh H, Wang C, et al. (2015) Tip characterization method using multi-feature characterizer for CD-AFM. Ultramicroscopy. 162: 25-34
Dixson R, Ng BP, Bonnaud X, et al. (2015) Interactions of higher order tip effects in critical dimension-AFM linewidth metrology Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 33
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