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Zongliang Cao, Ph.D.

Affiliations: 
2011 Electrical Engineering Michigan State University, East Lansing, MI 
Area:
Electronics and Electrical Engineering
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"Zongliang Cao"
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Parents

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Dean M. Aslam grad student 2011 Michigan State
 (Single-material MEMS using polycyrstalline diamond.)

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Publications

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Cao Z, Varney MW, Aslam DM. (2015) JMEMS Letters Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications Journal of Microelectromechanical Systems
Cao Z, Aslam D. (2010) Fabrication technology for single-material MEMS using polycrystalline diamond Diamond and Related Materials. 19: 1263-1272
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