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Lawrence J. Overzet

Affiliations: 
Electrical Engineering University of Texas at Dallas, Richardson, TX, United States 
Area:
Electronics and Electrical Engineering
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Children

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Marwan H. Khater grad student 2000 UT Dallas
Jennifer L. Kleber grad student 2000 UT Dallas
Sivananda K. Kanakasabapathy grad student 2001 UT Dallas
Baosuo Zhou grad student 2004 UT Dallas
Eric A. Joseph grad student 2005 UT Dallas
Anand Chandrashekar grad student 2006 UT Dallas
Yonghua Liu grad student 2006 UT Dallas
Sanket P. Sant grad student 2006 UT Dallas
Seetharaman Ramachandran grad student 2008 UT Dallas
Gabriel Padron Wells grad student 2011 UT Dallas
Iqbal R. Saraf grad student 2011 UT Dallas
Isabel C. Estrada Raygoza grad student 2012 UT Dallas
Daisuke Ogawa grad student 2012 UT Dallas

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Publications

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Hernandez K, Overzet LJ, Goeckner MJ. (2020) Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 38: 34005
Press AF, Goeckner MJ, Overzet LJ. (2019) Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma Journal of Vacuum Science & Technology B. 37: 062926
Michaud R, Felix V, Stolz A, et al. (2018) Direct current microhollow cathode discharges on silicon devices operating in argon and helium Plasma Sources Science and Technology. 27: 25005
Poulose J, Goeckner M, Shannon S, et al. (2017) Driving frequency fluctuations in pulsed capacitively coupled plasmas The European Physical Journal D. 71
Sundaram NG, Ramachandran S, Overzet L, et al. (2016) Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications Journal of Materials Research. 1-11
Felix V, Lefaucheux P, Aubry O, et al. (2016) Origin of microplasma instabilities during DC operation of silicon based microhollow cathode devices Plasma Sources Science and Technology. 25
Sundaram N, Lee GS, Goeckner M, et al. (2015) Study and optimization of PECVD films containing fluorine and carbon as ultra low dielectric constant interlayer dielectrics in ULSI devices Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 33
Urrabazo D, Veyan JF, Goeckner MJ, et al. (2015) Ion induced electron emission from chemically cleaned Si and Ge Journal of Physics D: Applied Physics. 48
Urrabazo D, Overzet LJ. (2015) The effects of the Fermi level on ion induced electron emission from chemically and sputter cleaned semiconductors Journal of Physics D: Applied Physics. 48
Bates RL, Goeckner MJ, Overzet LJ. (2014) Correction of aspect ratio dependent etch disparities Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32
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