Amogh V. Prabhu, Ph.D.
Affiliations: | 2008 | Chemical Engineering | University of Texas at Austin, Austin, Texas, U.S.A. |
Area:
Chemical EngineeringGoogle:
"Amogh Prabhu"Parents
Sign in to add mentorThomas F Edgar | grad student | 2008 | UT Austin | |
(Performance monitoring of run -to -run control systems used in semiconductor manufacturing.) |
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Publications
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Prabhu AV, Edgar TF. (2009) A new state estimation method for high-mix semiconductor manufacturing processes Journal of Process Control. 19: 1149-1161 |
Prabhu AV, Edgar TF, Good R. (2009) Missing data estimation for run-to-run EWMA-controlled processes Computers and Chemical Engineering. 33: 1861-1869 |
Prabhu AV, Edgar TF. (2007) Performance assessment of run-to-run EWMA controllers Ieee Transactions On Semiconductor Manufacturing. 20: 381-385 |