Ramarajesh Katamreddy, Ph.D.
Affiliations: | 2007 | University of Illinois at Chicago, Chicago, IL, United States |
Area:
Chemical EngineeringGoogle:
"Ramarajesh Katamreddy"Parents
Sign in to add mentor| Christos G. Takoudis | grad student | 2007 | University of Illinois, Chicago | |
| (Structural and interfacial studies of atomic layer deposited high-k materials on silicon.) | ||||
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Publications
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| Katamreddy R, Stafford NA, Guerin L, et al. (2009) Atomic layer deposition of rare-earth oxide thin films for high-κ dielectric applications Ecs Transactions. 19: 525-536 |
| Katamreddy R, Wang Z, Omarjee V, et al. (2009) Advanced precursor development for Sr and Ti based oxide thin film applications Ecs Transactions. 25: 217-230 |
| Katamreddy R, Omarjee V, Feist B, et al. (2008) Tuning of material and electrical properties of strontium titanates using process chemistry and composition Ecs Transactions. 16: 487-496 |
| Katamreddy R, Omarjee V, Feist B, et al. (2008) Ti source precursors for atomic layer deposition of TiO |
| Katamreddy R, Feist B, Takoudis C. (2008) Bis(diethylamino) silane as the silicon precursor in the atomic layer deposition of HfSiOx Journal of the Electrochemical Society. 155 |
| Katamreddy R, Inman R, Jursich G, et al. (2008) Nitridation and oxynitridation of Si to control interfacial reaction with HfO |
| Katamreddy R, Inman R, Jursich G, et al. (2008) Effect of film composition and structure on the crystallization point of atomic layer deposited HfAlO |
| Singh MK, Rosado J, Katamreddy R, et al. (2007) Investigation of local coordination and electronic structure of dielectric thin films from theoretical energy-loss spectra Materials Research Society Symposium Proceedings. 996: 121-126 |
| Singh MK, Katamreddy R, Takoudis CG. (2007) Effect of oxidizer on chemical vapor deposited hafnium oxide-based nanostructures and the engineering of their interfaces with Si(100) Materials Research Society Symposium Proceedings. 996: 98-102 |
| Katamreddy R, Inman R, Jursich G, et al. (2007) Atomic layer deposition of HfO |