☰

Aniruddha Vengurlekar, Ph.D.

Affiliations: 
2005 Pennsylvania State University, State College, PA, United States 
Area:
Materials Science Engineering
Google:
"Aniruddha Vengurlekar"
Tree Publications Similar researchers PubMed Report error

Parents

Sign in to add mentor
S Ashok grad student 2005 Penn State
 (Catalytic interactions of hydrogen in silicon processing.)

Children

Sign in to add trainee

Collaborators

Sign in to add collaborator
BETA: Related publications

Publications

You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect.

Prabhu SS, Deshpande A, Chaubal AU, et al. (2010) Time resolved THz-spectroscopy of As-implanted GaAs Irmmw-Thz 2010 - 35th International Conference On Infrared, Millimeter, and Terahertz Waves, Conference Guide
Vengurlekar A, Balasubramanian S, Ashok S, et al. (2006) Influence of hydrogen plasma surface treatment of Si substrate on nickel silicide formation Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 1449-1454
Liu CL, Ntsoenzok E, Vengurlekar A, et al. (2005) Enhancement of He-induced cavities in silicon by hydrogen plasma treatment Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23: 990-994
Vengurlekar A, Ashok S, Kalnas CE, et al. (2005) Mechanism of dopant activation enhancement in shallow junctions by hydrogen Materials Research Society Symposium Proceedings. 864: 515-520
Vengurlekar A, Ashok S, Kalnas CE, et al. (2004) Hydrogen plasma enhancement of boron activation in shallow junctions Applied Physics Letters. 85: 4052-4054
Vengurlekar A, Ashok S, Theodore D. (2004) Hydrogenation-enhanced low temperature activation of boron in silicon Extended Abstracts of the Fourth International Workshop On Junction Technology, Iwjt 2004. 4: 42-45
Vengurlekar A, Ashok S, Kalnas CE, et al. (2004) Enhancement of boron activation in shallow junctions by hydrogen Materials Research Society Symposium - Proceedings. 810: 325-330
Alquier D, Ntsoenzok E, Liu CL, et al. (2004) Impact of hydrogen plasma treatment on gettering by he implantation-induced cavities in silicon Materials Research Society Symposium Proceedings. 813: 55-60
Vengurlekar A, Balasubramanian S, Ashok S, et al. (2004) Effect of silicon substrate hydrogenation treatment on nickel suicide formation Extended Abstracts of the Fourth International Workshop On Junction Technology, Iwjt 2004. 4: 123-126
Vengurlekar A, Balasubramanian S, Ashok S, et al. (2004) Influence of atomic hydrogen on nickel silicide formation Materials Research Society Symposium - Proceedings. 810: 159-164
See more...