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Anton F. Jachim, Ph.D.

Affiliations: 
2001 University of Wisconsin, Madison, Madison, WI 
Area:
Mechanical Engineering, Materials Science Engineering
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Edward G. Lovell grad student 2001 UW Madison
 (Interpretation of stresses in thin films from wafer shape.)

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Schlax MP, Jachim AF, Engelstad RL, et al. (1999) Thin film stress mapping using an integrated sensor Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 17: 2714-2718
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