Scott A. Middlebrooks, Ph.D.
Affiliations: | 2001 | University of Wisconsin, Madison, Madison, WI |
Area:
Chemical EngineeringGoogle:
"Scott Middlebrooks"Parents
Sign in to add mentor| James B. Rawlings | grad student | 2001 | UW Madison | |
| (Modelling and control of silicon and germanium thin film chemical vapor deposition.) | ||||
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Publications
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| Middlebrooks SA, Rawlings JB. (2007) Model predictive control of Si |
| Middlebrooks SA, Rawlings JB. (2006) State estimation approach for determining composition and growth rate of Si1-xGex chemical vapor deposition utilizing real-time ellipsometric measurements. Applied Optics. 45: 7043-55 |
| Middlebrooks SA, Rawlings JB. (2006) State estimation approach for determining composition and growth rate of Si<inf>1-x</inf>Ge<inf>x</inf> chemical vapor deposition utilizing real-time ellipsometric measurements Applied Optics. 45: 7043-7055 |
| Middlebrooks SA. (2003) Optimal Model-Predictive Control of Overlay Lithography Implemented in an ASIC Fab Proceedings of Spie - the International Society For Optical Engineering. 5044: 12-23 |