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Daphne Joachim, Ph.D.

Affiliations: 
2001 University of Michigan, Ann Arbor, Ann Arbor, MI 
Area:
Nanotechnology; design and manufacturing of microsensors and microactuators
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Liwei Lin grad student 2001 University of Michigan
 (Selective deposition of polycrystalline silicon for tuning micro-electro-mechanical resonators: Experiment and simulation.)

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Publications

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Joachim D, Lin L. (2002) Selective polysilicon deposition for frequency tuning of MEMS resonators Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 727-730
Joachim D, Lin L. (2001) Design of MEMS resonators for tuning with selective polysilicon deposition American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (Mems). 3: 175-180
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