Jinshan Huo
Affiliations: | 2004 | Oregon Health and Science University, Portland, OR |
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Parents
Sign in to add mentor| Raj Solanki | grad student | 2004 | OHSU | |
| (Electrochemical planarization of copper for microelectronic applications.) | ||||
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Publications
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| Huo J, Solanki R, McAndrew J. (2005) A novel electroplanarization system for replacement of CMP Electrochemical and Solid-State Letters. 8 |
| Huo J, Solanki R, McAndrew J. (2004) Study of anodic layers and their effects on electropolishing of bulk and electroplated films of copper Journal of Applied Electrochemistry. 34: 305-314 |
| Huo J, Solanki R, McAndrew J. (2003) Electrochemical Polishing of Copper for Microelectronic Applications Surface Engineering. 19: 11-16 |
| Huo J, Solanki R, McAndrew J. (2002) Characteristics of copper films produced via atomic layer deposition Journal of Materials Research. 17: 2394-2398 |