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Craig Garvin, Ph.D.

Affiliations: 
2000 University of Michigan, Ann Arbor, Ann Arbor, MI 
Area:
Electronics and Electrical Engineering, Medicine and Surgery
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Jessy W. Grizzle grad student 2000 University of Michigan
 (Radio frequency based sensors for diagnostics and control of plasma -assisted micromanufacturing.)

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Publications

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Klimecky P, Garvin C, Galarza CG, et al. (2001) Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization Journal of the Electrochemical Society. 148
Garvin C, Grizzle JW. (2000) Demonstration of broadband radio frequency sensing: Empirical polysilicon etch rate estimation in a Lam 9400 etch tool Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 1297-1302
Garvin C, Grimard DS, Grizzle JW. (1999) Advances in broadband radio-frequency sensing for real-time control of plasma-based semiconductor processing Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 17: 1377-1383
Park HM, Garvin C, Grimard DS, et al. (1998) Control of ion energy in a capacitively coupled reactive ion etcher Journal of the Electrochemical Society. 145: 4247-4252
Garvin C, Grimard D, Grizzle J, et al. (1998) Measurement And Error Evaluation Of Electrical Parameters At Plasma Relevant Frequencies And Impedances Journal of Vacuum Science and Technology. 16: 595-606
Garvin C, Grizzle JW. (1998) RF sensing for real-time monitoring of plasma processing Characterization and Metrology For Ulsi Technology. 449: 442-446
Garvin C, Grimard D, Grizzle J, et al. (1998) Measurement and error evaluation of electrical parameters at plasma relevant frequencies and impedances Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 16: 595-606
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