Lala Zhu, Ph.D.
Affiliations: | 2014 | Physics and Astronomy | University of Delaware, Newark, DE, United States |
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering, Materials Science EngineeringGoogle:
"Lala Zhu"Parents
Sign in to add mentorRobert W. Birkmire | grad student | 2014 | University of Delaware | |
(Plasma enhanced chemical vapor deposition of silicon thin films: Characterization of film growth at different frequencies and gas compositions utilizing plasma diagnostics.) |
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Publications
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Zhu L, Das UK, Hegedus SS, et al. (2013) Effect of RF or VHF plasma on nanocrystalline silicon thin film structure: Insight from OES and Langmuir Probe measurements Materials Research Society Symposium Proceedings. 1536: 161-166 |