Joe Lee, Ph.D. - Publications
Affiliations: | 2013 | Chemical Engineering | University of California, Berkeley, Berkeley, CA, United States |
Year | Citation | Score | |||
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2013 | Lee J, Kazi H, Gaddam S, Kelber JA, Graves DB. Effects of He and Ar ion kinetic energies in protection of organosilicate glass from O2 plasma damage Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 31. DOI: 10.1116/1.4809579 | 0.445 | |||
2013 | Lee J, Graves DB. Roles of plasma-generated vacuum-ultraviolet photons and oxygen radicals in damaging nanoporous low-k films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 31. DOI: 10.1116/1.4807299 | 0.456 | |||
2010 | Behera S, Lee J, Gaddam S, Pokharel S, Wilks J, Pasquale F, Graves D, Kelber JA. Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3 Applied Physics Letters. 97. DOI: 10.1063/1.3466905 | 0.445 | |||
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