Iqbal R. Saraf, Ph.D. - Publications
Affiliations: | 2011 | Electrical Engineering | University of Texas at Dallas, Richardson, TX, United States |
Area:
Electronics and Electrical EngineeringYear | Citation | Score | |||
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2013 | Saraf IR, Goeckner MJ, Goodlin BE, Kirmse KHR, Nelson CT, Overzet LJ. Kinetics of the deposition step in time multiplexed deep silicon etches Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31. DOI: 10.1116/1.4769873 | 0.579 | |||
2011 | Saraf I, Goeckner M, Goodlin B, Kirmse K, Overzet L. Mask undercut in deep silicon etch Applied Physics Letters. 98: 161502. DOI: 10.1063/1.3579542 | 0.57 | |||
2009 | Ogawa D, Saraf I, Sra A, Timmons R, Goeckner M, Overzet L. The direct injection of liquid droplets into low pressure plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 27: 342-351. DOI: 10.1116/1.3081965 | 0.452 | |||
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