Parents
Sign in to add mentor| Thomas W. Kenny | grad student | 2001 | Stanford | |
| (Electrical through -wafer interconnects and microfabricated cantilever arrays using through-wafer silicon etching.) | ||||
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Publications
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| Chow EM, Chua C, Hantschel T, et al. (2006) Pressure contact micro-springs in small pitch flip-chip packages Ieee Transactions On Components and Packaging Technologies. 29: 796-802 |
| Chow EM, Chua C, Hantschel T, et al. (2005) Solder-free pressure contact micro-springs in high-density flip-chip packages Proceedings - Electronic Components and Technology Conference. 2: 1119-1126 |
| Chow EM, Hantschel T, Klein K, et al. (2003) Micro-spring force characterization and applications in integrated circuit packaging and scanning probe MEMS metrology Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 408-411 |
| Hantschel T, Chow EM, Rudolph D, et al. (2003) Stressed-metal NiZr probes for atomic force microscopy Microelectronic Engineering. 67: 803-809 |
| Chow EM, Chandrasekaran V, Partridge A, et al. (2002) Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates Journal of Microelectromechanical Systems. 11: 631-640 |
| Hantschel T, Chow EM, Rudolph D, et al. (2002) Stressed metal probes for atomic force microscopy Applied Physics Letters. 81: 3070-3072 |
| Chow EM, Yaralioglu GG, Quate CF, et al. (2002) Characterization of a two-dimensional cantilever array with through-wafer electrical interconnects Applied Physics Letters. 80: 664-666 |
| Yasumura KY, Stowe TD, Chow EM, et al. (2000) Quality factors in micron- and submicron-thick cantilevers Journal of Microelectromechanical Systems. 9: 117-125 |
| Partridge A, Reynolds JK, Chui BW, et al. (2000) High-performance planar piezoresistive accelerometer Journal of Microelectromechanical Systems. 9: 58-66 |
| Rudnitsky RG, Chow EM, Kenny TW. (2000) Rapid biochemical detection and differentiation with magnetic force microscope cantilever arrays Sensors and Actuators, a: Physical. 83: 256-262 |