Yiheng Xu, Ph.D.
Affiliations: | 2000 | University of Maryland, College Park, College Park, MD |
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BiomedicalGoogle:
"Yiheng Xu"Parents
Sign in to add mentor| Gary W. Rubloff | grad student | 2000 | University of Maryland | |
| (Real-time in-situ chemical sensing, sensor-based film thickness metrology, and process control in W -CVD process.) | ||||
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Publications
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| Xu Y, Gougousi T, Henn-Lecordier L, et al. (2002) Thickness metrology and end point control in W chemical vapor deposition process from SiH4/WF6 using in situ mass spectrometry Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 2351-2360 |
| Sreenivasan R, Gougousi T, Xu Y, et al. (2001) Run to run control in tungsten chemical vapor deposition using H2/WF6 at low pressures Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 1931-1941 |
| Gougousi T, Xu Y, Kidder JN, et al. (2000) Process diagnostics and thickness metrology using in situ mass spectrometry for the chemical vapor deposition of W from H2/WF6 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1352-1363 |