Yuhong Cai, Ph.D.
Affiliations: | 2005 | University of Maryland, College Park, College Park, MD |
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"Yuhong Cai"Parents
Sign in to add mentorGary W. Rubloff | grad student | 2005 | University of Maryland | |
(Multiplexed chemical sensing and thin film metrology in programmable CVD process.) |
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Publications
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Cai Y, Henn-Lecordier L, Rubloff GW, et al. (2007) Multiplexed mass spectrometry for real-time sensing in a spatially programmable chemical vapor deposition reactor Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25: 1288-1297 |
Choo JO, Adomaitis RA, Henn-Lecordier L, et al. (2005) Development of a spatially controllable chemical vapor deposition reactor with combinatorial processing capabilities Review of Scientific Instruments. 76 |