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Shusen Huang, Ph.D.

Affiliations: 
2007 Boston University, Boston, MA, United States 
Area:
Electronics and Electrical Engineering, Mechanical Engineering, Materials Science Engineering
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Xin Zhang grad student 2007 Boston University
 (Development of double -cantilever infrared detectors.)

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Publications

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Huang S, Tao H, Lin I, et al. (2008) Development of double-cantilever infrared detectors: Fabrication, curvature control and demonstration of thermal detection☆ Sensors and Actuators a-Physical. 145: 231-240
Huang S, Zhang X. (2007) Study of gradient stress in bimaterial cantilever structures for infrared applications Journal of Micromechanics and Microengineering. 17: 1211-1219
Huang S, Zhang X. (2007) Gradient residual stress induced elastic deformation of multilayer MEMS structures Sensors and Actuators a-Physical. 134: 177-185
Huang S, Lin I, Tao H, et al. (2006) Development of Double-cantilever Infrared Focal Plane Arrays: Fabrication and Post-process Curvature Modification Mrs Proceedings. 952
Huang S, Zhang X. (2006) Extension of the stoney formula for film-substrate systems with gradient stress for MEMS applications Journal of Micromechanics and Microengineering. 16: 382-389
Huang S, Li B, Zhang X. (2006) Elimination of stress-induced curvature in microcantilever infrared focal plane arrays Sensors and Actuators a-Physical. 130: 331-339
Huang S, Zhang X. (2004) Stress Hysteresis and Thermal-Mechanical Behavior of PECVD Silicon Nitride and Ebeam Aluminum Films for Microbolometer Applications Mrs Proceedings. 854
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