Roger T. Howe - Publications

Affiliations: 
1984-1985 Carnegie Mellon University, Pittsburgh, PA 
 1985-1987 Massachusetts Institute of Technology, Cambridge, MA, United States 
 1987-2005 Electrical Engineering University of California, Berkeley, Berkeley, CA 
 2005- Electrical Engineering Stanford University, Palo Alto, CA 
Website:
http://web.stanford.edu/group/howe/

183 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2015 Emaminejad S, Javanmard M, Gupta C, Chang S, Davis RW, Howe RT. Tunable control of antibody immobilization using electric field. Proceedings of the National Academy of Sciences of the United States of America. 112: 1995-9. PMID 25650429 DOI: 10.1073/Pnas.1424592112  1
2015 Ng EJ, Harrison KL, Yang Y, Ahn CH, Hong VA, Howe RT, Kenny TW. Stable Encapsulated Charge-Biased Resonators Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2483365  0.8
2015 Chang CE, Segal JD, Roodman AJ, Kenney CJ, Howe RT. Experimental demonstration of a stacked SOI multiband charged-coupled device Technical Digest - International Electron Devices Meeting, Iedm. 2015: 4.5.1-4.5.4. DOI: 10.1109/IEDM.2014.7046983  1
2015 Dumpala S, Broderick SR, Khalilov U, Neyts EC, Van Duin ACT, Provine J, Howe RT, Rajan K. Integrated atomistic chemical imaging and reactive force field molecular dynamic simulations on silicon oxidation Applied Physics Letters. 106. DOI: 10.1063/1.4905442  1
2014 Ma J, Chang S, Howe R. Rapid time domain molecular conductance measurement of alkanedithiols using STM Materials Research Society Symposium Proceedings. 1712. DOI: 10.1557/Opl.2014.698  1
2014 Tang WM, Aboudi U, Provine J, Howe RT, Wong HSP. Improved performance of bottom-contact organic thin-film transistor using Al doped HfO2 gate dielectric Ieee Transactions On Electron Devices. 61: 2398-2403. DOI: 10.1109/Ted.2014.2325042  1
2014 Ng EJ, Harrison KL, Everhart CL, Hong VA, Yang Y, Ahn CH, Heinz DB, Howe RT, Kenny TW. Stable charge-biased capacitive resonators with encapsulated switches Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1277-1280. DOI: 10.1109/MEMSYS.2014.6765882  1
2014 Park B, Jung IW, Provine J, Gellineau A, Landry J, Howe RT, Solgaard O. Double-layer silicon photonic crystal fiber-tip temperature sensors Ieee Photonics Technology Letters. 26: 900-903. DOI: 10.1109/Lpt.2014.2309345  1
2014 Shavezipur M, Harrison K, Lee WS, Mitra S, Wong HSP, Howe RT. Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2014.2335157  1
2014 Solgaard O, Godil AA, Howe RT, Lee LP, Peter YA, Zappe H. Optical MEMS: From micromirrors to complex systems Journal of Microelectromechanical Systems. 23: 517-538. DOI: 10.1109/Jmems.2014.2319266  1
2014 Lee JH, Bargatin I, Vancil BK, Gwinn TO, Maboudian R, Melosh NA, Howe RT. Microfabricated thermally isolated low work-function emitter Journal of Microelectromechanical Systems. 23: 1182-1187. DOI: 10.1109/Jmems.2014.2307882  1
2014 Harrison KL, Dalvi C, Asheghi M, Howe RT. Analysis of asperity dominated contacts in nanoelectromechanical relays using thin films Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference. 1256-1260. DOI: 10.1109/ITHERM.2014.6892425  1
2014 Chou SH, Voss J, Vojvodic A, Howe RT, Abild-Pedersen F. DFT study of atomically-modified alkali-earth metal oxide films on tungsten Journal of Physical Chemistry C. 118: 11303-11309. DOI: 10.1021/Jp4120578  1
2014 Javanmard M, Emaminejad S, Gupta C, Provine J, Davis RW, Howe RT. Depletion of cells and abundant proteins from biological samples byenhanced dielectrophoresis Sensors and Actuators, B: Chemical. 193: 918-924. DOI: 10.1016/j.snb.2013.11.100  1
2014 Chou SH, Voss J, Vojvodic A, Howe RT, Abild-Pedersen F. Discovering materials with ultra-low work functions for thermionics energy conversion Nanoscale Science and Engineering Forum 2013 - Core Programming Area At the 2013 Aiche Annual Meeting: Global Challenges For Engineering a Sustainable Future. 312.  1
2013 Littau KA, Sahasrabuddhe K, Barfield D, Yuan H, Shen ZX, Howe RT, Melosh NA. Microbead-separated thermionic energy converter with enhanced emission current. Physical Chemistry Chemical Physics : Pccp. 15: 14442-6. PMID 23881241 DOI: 10.1039/C3Cp52895B  1
2013 Voss J, Vojvodic A, Chou SH, Howe RT, Bargatin I, Abild-Pedersen F. Thermionic current densities from first principles. The Journal of Chemical Physics. 138: 204701. PMID 23742494 DOI: 10.1063/1.4805002  1
2013 Schwede JW, Sarmiento T, Narasimhan VK, Rosenthal SJ, Riley DC, Schmitt F, Bargatin I, Sahasrabuddhe K, Howe RT, Harris JS, Melosh NA, Shen ZX. Photon-enhanced thermionic emission from heterostructures with low interface recombination. Nature Communications. 4: 1576. PMID 23481384 DOI: 10.1038/Ncomms2577  1
2013 Emaminejae S, Javanmare M, Gupta C, Dutton RW, Davis RW, Howe RT. Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 2345-2348. DOI: 10.1109/Transducers.2013.6627276  1
2013 Haemmerli AJ, Doll JC, Provine J, Howe RT, Goldhaber-Gordon D, Pruitt BL. Ultra-thin atomic layer deposition films for corrosion resistance 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1931-1934. DOI: 10.1109/Transducers.2013.6627171  1
2013 Purkl F, English TS, Yama G, Provine J, Samarao AK, Feyh A, Kim B, O'Brien G, Ambacher O, Howe RT, Kenny TW. Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1507-1510. DOI: 10.1109/Transducers.2013.6627067  1
2013 Harrison KL, Lee WS, Shavezipur K, Provine J, Mitra S, Wong HSP, Howe RT. Dual-beam, six-terminal nanoelectromechanical relays 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1436-1439. DOI: 10.1109/Transducers.2013.6627049  1
2013 Lee D, Lee WS, Chen C, Fallah F, Provine J, Chong S, Watkins J, Howe RT, Wong HSP, Mitra S. Combinational logic design using six-terminal NEM relays Ieee Transactions On Computer-Aided Design of Integrated Circuits and Systems. 32: 653-666. DOI: 10.1109/Tcad.2012.2232707  1
2013 Shavezipur M, Lee WS, Harrison KL, Provine J, Mitra S, Wong HSP, Howe RT. Laterally actuated nanoelectromechanical relays with compliant, low resistance contact Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 520-523. DOI: 10.1109/MEMSYS.2013.6474293  1
2013 Purkl F, English T, Yama G, Provine J, Samarao AK, Feyh A, O'Brien G, Ambacher O, Howe RT, Kenny TW. Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 185-188. DOI: 10.1109/MEMSYS.2013.6474208  1
2013 Parsa R, Lee WS, Shavezipur M, Provine J, Maboudian R, Mitra S, Wong HSP, Howe RT. Laterally actuated platinum-coated polysilicon NEM relays Journal of Microelectromechanical Systems. 22: 768-778. DOI: 10.1109/Jmems.2013.2244779  1
2013 Gellineau AA, Rastegar AJ, Howe RT. Capacitive accelerometer laboratory using polymer-film rapid prototyping technology Proceedings of the 3rd Interdisciplinary Engineering Design Education Conference, Iedec 2013. 79-82. DOI: 10.1109/IEDEC.2013.6526764  1
2013 Javanmard M, Emaminejad S, Davis RW, Gupta C, Howe RT. Three stage sample preparation for purification of proteins from complex biological samples Ieee Sensors 2013 - Proceedings. DOI: 10.1109/ICSENS.2013.6688315  1
2013 Jain JR, Hryciw A, Baer TM, Miller DAB, Brongersma ML, Howe RT. Jain et al. reply Nature Photonics. 7: 162-163. DOI: 10.1038/Nphoton.2013.50  1
2013 Hennessy RG, Shulaker MM, Messana M, Graham AB, Klejwa N, Provine J, Kenny TW, Howe RT. Vacuum encapsulated resonators for humidity measurement Sensors and Actuators, B: Chemical. 185: 575-581. DOI: 10.1016/J.Snb.2013.05.016  1
2013 Shavezipur M, Harrison KL, Lee WS, Espinosa B, Provine J, Mitra S, Wong HSP, Howe RT. Contact properties of titanium nitride sideewall coating for nanoelectromechanical electronics Technical Proceedings of the 2013 Nsti Nanotechnology Conference and Expo, Nsti-Nanotech 2013. 1: 128-131.  1
2013 Javanmard M, Emaminejad S, Gupta C, Chang S, Davis RW, Howe RT. Immobilization of antibodies on solid-state surfaces with controlled orientation using electric field 17th International Conference On Miniaturized Systems For Chemistry and Life Sciences, Microtas 2013. 2: 699-701.  1
2013 Emaminejad S, Javanmard M, Gupta C, Dutton RW, Davis RW, Howe RT. Ultra dielectrophoresis: Electrothermal analysis and its applications in microfluidic sample preparation and proteomics 17th International Conference On Miniaturized Systems For Chemistry and Life Sciences, Microtas 2013. 2: 850-852.  1
2012 Chou SH, Voss J, Bargatin I, Vojvodic A, Howe RT, Abild-Pedersen F. An orbital-overlap model for minimal work functions of cesiated metal surfaces. Journal of Physics. Condensed Matter : An Institute of Physics Journal. 24: 445007. PMID 23018485 DOI: 10.1088/0953-8984/24/44/445007  1
2012 Paik KH, Liu Y, Tabard-Cossa V, Waugh MJ, Huber DE, Provine J, Howe RT, Dutton RW, Davis RW. Control of DNA capture by nanofluidic transistors. Acs Nano. 6: 6767-75. PMID 22762282 DOI: 10.1021/Nn3014917  1
2012 Roper CS, Gutés A, Carraro C, Howe RT, Maboudian R. Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration. Nanotechnology. 23: 225303. PMID 22572054 DOI: 10.1088/0957-4484/23/22/225303  1
2012 Yoneoka S, Lee J, Liger M, Yama G, Kodama T, Gunji M, Provine J, Howe RT, Goodson KE, Kenny TW. Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness. Nano Letters. 12: 683-6. PMID 22224582 DOI: 10.1021/Nl203548W  1
2012 Gupta C, Walker RM, Gharpuray R, Shulaker MM, Zhang Z, Javanmard M, Davis RW, Murmann B, Howe RT. Electrochemical quantum tunneling for electronic detection and characterization of biological toxins Proceedings of Spie - the International Society For Optical Engineering. 8373. DOI: 10.1117/12.920692  1
2012 Lee JH, Bargatin I, Park J, Milaninia KM, Theogarajan LS, Sinclair R, Howe RT. Smart-cut layer transfer of single-crystal SiC using spin-on-glass Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30. DOI: 10.1116/1.4734006  1
2012 Chong S, Lee B, Mitra S, Howe RT, Wong HSP. Integration of nanoelectromechanical relays with silicon nMOS Ieee Transactions On Electron Devices. 59: 255-258. DOI: 10.1109/Ted.2011.2172946  1
2012 Chang CE, Segal JD, Roodman AJ, Howe RT, Kenney CJ. Multiband charge-coupled device Ieee Nuclear Science Symposium Conference Record. 743-746. DOI: 10.1109/NSSMIC.2012.6551202  1
2012 Lee JH, Bargatin I, Gwinn TO, Vincent M, Littau KA, Maboudian R, Shen ZX, Melosh NA, Howe RT. Microfabricated silicon carbide thermionic energy converter for solar electricity generation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1261-1264. DOI: 10.1109/MEMSYS.2012.6170386  1
2012 Park B, Woong Jung I, Provine J, Howe RT, Solgaard O. Double-layer silicon photonic crystal fiber tip temperature sensor 2012 Ieee Photonics Conference, Ipc 2012. 550-551. DOI: 10.1109/IPCon.2012.6358738  1
2012 Tang WM, Aboudi U, Provine J, Howe RT, Wong HSP. Electrical properties of CuPc-based OTFTs with atomic layer deposited HfAlO gate dielectric 2012 Ieee International Conference On Electron Devices and Solid State Circuit, Edssc 2012. DOI: 10.1109/EDSSC.2012.6482866  1
2012 Sedky S, Tawfik H, Ashour M, Graham AB, Provine J, Wang Q, Zhang XX, Howe RT. Microencapsulation of silicon cavities using a pulsed excimer laser Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/7/075012  1
2012 Chen JWP, Provine J, Klejwa N, Howe RT. A dry wafer-reconstitution process with zero insertion force by embedded alignment guide tabs Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/6/065007  1
2012 Sahasrabuddhe K, Schwede JW, Bargatin I, Jean J, Howe RT, Shen ZX, Melosh NA. A model for emission yield from planar photocathodes based on photon-enhanced thermionic emission or negative-electron-affinity photoemission Journal of Applied Physics. 112. DOI: 10.1063/1.4764106  1
2012 Lee JH, Bargatin I, Melosh NA, Howe RT. Optimal emitter-collector gap for thermionic energy converters Applied Physics Letters. 100. DOI: 10.1063/1.4707379  1
2012 Jain JR, Hryciw A, Baer TM, Miller DAB, Brongersma ML, Howe RT. A micromachining-based technology for enhancing germanium light emission via tensile strain Nature Photonics. 6: 398-405. DOI: 10.1038/Nphoton.2012.111  1
2012 Broderick SR, Suh C, Provine J, Roper CS, Maboudian R, Howe RT, Rajan K. Application of principal component analysis to a full profile correlative analysis of FTIR spectra Surface and Interface Analysis. 44: 365-371. DOI: 10.1002/Sia.3813  1
2012 Chen C, Lee WS, Parsa R, Chong S, Provine J, Watt J, Howe RT, Wong HSP, Mitra S. Nano-Electro-Mechanical relays for FPGA routing: Experimental demonstration and a design technique Proceedings -Design, Automation and Test in Europe, Date. 1361-1366.  1
2011 Jain JR, Ly-Gagnon DS, Balram KC, White JS, Brongersma ML, Miller DAB, Howe RT. Tensile-strained germanium-on-insulator substrate fabrication for silicon-compatible optoelectronics Optical Materials Express. 1: 1121-1126. DOI: 10.1364/Ome.1.001121  1
2011 Howe RT. Vacuum microsystems for energy conversion and other applications 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 7-11. DOI: 10.1109/TRANSDUCERS.2011.5969896  1
2011 Lee JH, Bargatin I, Provine J, Liu F, Seo MK, Maboudian R, Brongersma ML, Melosh NA, Shen ZX, Howe RT. Effect of illlumination on thermionic emission from microfabricated silicon carbide structures 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2658-2661. DOI: 10.1109/TRANSDUCERS.2011.5969879  1
2011 Lee WS, Chong S, Parsa R, Provine J, Lee D, Mitra S, Wong HSP, Howe RT. Dual sidewall lateral nanoelectromechanical relays with beam isolation 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2606-2609. DOI: 10.1109/TRANSDUCERS.2011.5969835  1
2011 Lee D, Mitra S, Howe RT, Wong HSP. Multi-spacer technique for low-voltage, high-aspect-ratio lateral electrostatic actuators 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2602-2605. DOI: 10.1109/TRANSDUCERS.2011.5969833  1
2011 Laboriante I, Klejwa N, Suwandi A, Carraro C, Howe RT, Maboudian R. Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2319-2322. DOI: 10.1109/TRANSDUCERS.2011.5969544  1
2011 Klejwa N, Hennessy RG, Chen JWP, Howe RT. A reel-to-reel compatible printed accelerometer 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 699-702. DOI: 10.1109/TRANSDUCERS.2011.5969203  1
2011 Chen KL, Wang S, Salvia JC, Melamud R, Howe RT, Kenny TW. Wafer-level epitaxial silicon packaging for out-of-plane RF MEMS resonators with integrated actuation electrodes Ieee Transactions On Components, Packaging and Manufacturing Technology. 1: 310-317. DOI: 10.1109/Tcpmt.2010.2100711  1
2011 Shen X, Chong S, Lee D, Parsa R, Howe RT, Wong HSP. 2D analytical model for the study of NEM relay device scaling International Conference On Simulation of Semiconductor Processes and Devices, Sispad. 243-246. DOI: 10.1109/SISPAD.2011.6035070  1
2011 Park B, Jung IW, Provine J, Shambat G, Vuckovic J, Howe RT, Solgaard O. Double-layer silicon photonic crystal fiber tip sensor International Conference On Optical Mems and Nanophotonics. 97-98. DOI: 10.1109/OMEMS.2011.6031088  1
2011 Parsa R, Shavezipur M, Lee WS, Chong S, Lee D, Wong HSP, Maboudian R, Howe RT. Nanoelectromechanical relays with decoupled electrode and suspension Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1361-1364. DOI: 10.1109/MEMSYS.2011.5734687  1
2011 Yoneoka S, Liger M, Yama G, Schuster R, Purkl F, Provine J, Prinz FB, Howe RT, Kenny TW. ALD-metal uncooled bolometer Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 676-679. DOI: 10.1109/MEMSYS.2011.5734515  1
2011 Sedky S, Tawfik H, Abdel Aziz A, ElSaegh S, Graham AB, Provine J, Howe RT. Low thermal-budget silicon sealed-cavity microencapsulation process Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 276-279. DOI: 10.1109/MEMSYS.2011.5734415  1
2011 Mallick SB, Jung IW, Meisner AM, Provine J, Howe RT, Solgaard O. Multilayered monolithic silicon photonic crystals Ieee Photonics Technology Letters. 23: 730-732. DOI: 10.1109/Lpt.2011.2132698  1
2011 Park B, Provine J, Jung IW, Howe RT, Solgaard O. Photonic crystal fiber tip sensor for high-temperature measurement Ieee Sensors Journal. 11: 2643-2648. DOI: 10.1109/Jsen.2011.2153844  1
2011 Bahl G, Salvia JC, Melamud R, Kim B, Howe RT, Kenny TW. AC polarization for charge-drift elimination in resonant electrostatic MEMS and oscillators Journal of Microelectromechanical Systems. 20: 355-364. DOI: 10.1109/Jmems.2010.2100027  1
2011 Tsai KL, Ziaei-Moayyed M, Candler RN, Hu W, Brand V, Klejwa N, Wang SX, Howe RT. Magnetic, mechanical, and optical characterization of a magnetic nanoparticle-embedded polymer for microactuation Journal of Microelectromechanical Systems. 20: 65-72. DOI: 10.1109/Jmems.2010.2093560  1
2011 Elata D, Leus V, Provine J, Hirshberg A, Howe RT. Electromechanical sensing of charge retention on floating electrodes Journal of Microelectromechanical Systems. 20: 150-156. DOI: 10.1109/Jmems.2010.2090499  1
2011 Jung IW, Park B, Provine J, Howe RT, Solgaard O. Highly sensitive monolithic silicon photonic crystal fiber tip sensor for simultaneous measurement of refractive index and temperature Journal of Lightwave Technology. 29: 1367-1374. DOI: 10.1109/Jlt.2011.2126018  1
2011 Paik KH, Liu Y, Tabard-Cossa V, Huber DE, Provine J, Howe RT, Davis RW, Dutton RW. Experimental demonstration and analysis of DNA passage in nanopore-based nanofluidic transistors Technical Digest - International Electron Devices Meeting, Iedm. 30.6.1-30.6.4. DOI: 10.1109/IEDM.2011.6131646  1
2011 Chong S, Lee B, Parizi KB, Provine J, Mitra S, Howe RT, Wong HSP. Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit Technical Digest - International Electron Devices Meeting, Iedm. 30.5.1-30.5.4. DOI: 10.1109/IEDM.2011.6131645  1
2011 Paik KH, Liu Y, Tabard-Cossa V, Huber DE, Provine J, Howe RT, Dutton RW, Davis RW. Efficient control of DNA transport in nanopore-based nanofluidic transistors 15th International Conference On Miniaturized Systems For Chemistry and Life Sciences 2011, Microtas 2011. 2: 1065-1067.  1
2011 Hinchet R, Montes L, Bouteloup G, Ardila G, Parsa R, Akarvardar K, Howe RT, Wong HSP. Electrical and mechanical characterization of lateral NEMS Switches Dtip 2011 - Symposium On Design, Test, Integration and Packaging of Mems/Moems. 348-351.  1
2010 Schwede JW, Bargatin I, Riley DC, Hardin BE, Rosenthal SJ, Sun Y, Schmitt F, Pianetta P, Howe RT, Shen ZX, Melosh NA. Photon-enhanced thermionic emission for solar concentrator systems. Nature Materials. 9: 762-7. PMID 20676086 DOI: 10.1038/Nmat2814  1
2010 Chen C, Parsa R, Patil N, Chong S, Akarvardar K, Provine J, Lewis D, Watt J, Howe RT, Wong HSP, Mitra S. Efficient FPGAs using nanoelectromechanical relays Acm/Sigda International Symposium On Field Programmable Gate Arrays - Fpga. 273-282. DOI: 10.1145/1723112.1723158  1
2010 Lee D, Lee WS, Mitra S, Howe RT, Wong HSP. Four-mask process based on spacer technology for scaled-down lateral NEM electrostatic actuators 2010 International Conference On Optical Mems and Nanophotonics, Optical Mems and Nanophotonics 2010. 35-36. DOI: 10.1109/OMEMS.2010.5672196  1
2010 Bahl G, Salvia J, Bargatin I, Yoneoka S, Melamud R, Kim B, Chandorkar S, Hopcroft MA, Bahl R, Howe RT, Kenny TW. Charge-drift elimination in resonant electrostatic MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 108-111. DOI: 10.1109/MEMSYS.2010.5442555  1
2010 Lee D, Lee WS, Provine J, Lee JO, Yoon JB, Howe RT, Mitra S, Wong HSP. Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 456-459. DOI: 10.1109/MEMSYS.2010.5442466  1
2010 Ziaei-Moayyed M, Quévy EP, Hsieh J, Howe RT. Efficient internal electrostatic transduction of the 41st radial mode of a ring resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 711-714. DOI: 10.1109/MEMSYS.2010.5442307  1
2010 Yoneoka S, Roper CS, Candler RN, Chandorkar SA, Graham AB, Provine J, Maboudian R, Howe RT, Kenny TW. Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC Journal of Microelectromechanical Systems. 19: 357-366. DOI: 10.1109/Jmems.2010.2040460  1
2010 Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274  1
2010 Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717  1
2010 Park B, Provine J, Howe RT, Solgaard O, Jung IW. High temperature photonic crystal fiber tip sensor Proceedings of Ieee Sensors. 970-974. DOI: 10.1109/ICSENS.2010.5690911  1
2010 Klejwa N, Provine J, Howe RT. pH sensor demonstrating a layout programmable squeeze pumped microfluidic platform Proceedings of Ieee Sensors. 936-939. DOI: 10.1109/ICSENS.2010.5690891  1
2010 Ziaei-Moayyed M, Howe RT. Higher-order dielectrically transduced bulk-mode ring resonator with low motional resistance 2010 Ieee International Frequency Control Symposium, Fcs 2010. 19-24. DOI: 10.1109/FREQ.2010.5556382  1
2010 Ziaei-Moayyed M, Elata D, Quévy EP, Howe RT. Differential internal dielectric transduction of a Lamé-mode resonator Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/11/115036  1
2010 Park B, Jung WIL, Provine J, Howe RT, Solgaard O. Monolithic silicon photonic crystal fiber tip sensor for refractive index and temperature sensing Optics Infobase Conference Papers 1
2010 Hadzialic S, Jung IW, Kilic O, Kim S, Provine J, Howe RT, Solgaard O. Photonic crystal mirrors for free-space communication and fiber-optic sensors Optics Infobase Conference Papers 1
2009 Kant R, Ferralis N, Provine J, Maboudian R, Howe RT. Experimental investigation of silicon surface migration in low pressure nonreducing gas environments Electrochemical and Solid-State Letters. 12: H437-H440. DOI: 10.1149/1.3236781  1
2009 Roper CS, Howe RT, Maboudian R. Room-temperature wet etching of polycrystalline and nanocrystalline silicon carbide thin films with hf and hn O3 Journal of the Electrochemical Society. 156: D104-D107. DOI: 10.1149/1.3061944  1
2009 Roper CS, Radmilovic V, Howe RT, Maboudian R. Electrical and mechanical characterization of doped and annealed polycrystalline 3C-SiC thin films Journal of the Electrochemical Society. 156: D5-D10. DOI: 10.1149/1.3000002  1
2009 Klejwa N, Misra R, Provine J, Howe RT, Klejwa SJ. Laser print patterning of planar spiral inductors and interdigitated capacitors Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 2745-2749. DOI: 10.1116/1.3264673  1
2009 Chen KL, Salvia J, Potter R, Howe RT, Kenny TW. Performance evaluation and equivalent model of silicon interconnects for fully-encapsulated RF MEMS devices Ieee Transactions On Advanced Packaging. 32: 402-409. DOI: 10.1109/Tadvp.2008.2005114  1
2009 Roper CS, Candler R, Yoneoka S, Kenny T, Howe RT, Maboudian R. Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1031-1034. DOI: 10.1109/SENSOR.2009.5285964  1
2009 Chen JWP, Howe RT. Wafer reconstitution with precision dry front-to-front registration Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1095-1098. DOI: 10.1109/SENSOR.2009.5285950  1
2009 Kant R, Ziaei-Moayyed M, Howe RT. Suspended microstructures made using silicon migration Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1091-1094. DOI: 10.1109/SENSOR.2009.5285949  1
2009 Tsai KL, Pickard D, Kao J, Yin X, Leen B, Knutson K, Kant R, Howe RT. Magnetic nanoparticle-driven pumping in microchannels Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2274-2277. DOI: 10.1109/SENSOR.2009.5285889  1
2009 Chen KL, Wang S, Salvia J, Howe RT, Kenny TW. Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1421-1424. DOI: 10.1109/SENSOR.2009.5285839  1
2009 Klejwa N, Misra R, Provine J, Klejwa SJ, Zhang M, Wang SX, Howe RT. Laser-printed magnetic-polymer microstructures Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 865-868. DOI: 10.1109/SENSOR.2009.5285826  1
2009 Ziaei-Moayyed M, Hsieh J, Chen JWP, Quévy EP, Elata D, Howe RT. Higher-order mode internal electrostatic transduction of a bulk-mode ring resonator on a quartz substrate Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2338-2341. DOI: 10.1109/SENSOR.2009.5285441  1
2009 Jung IW, Park B, Provine J, Howe RT, Solgaard O. Monolithic silicon photonic crystal slab fiber tip sensor 2009 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Optmems 2009. 19-20. DOI: 10.1109/OMEMS.2009.5338625  1
2009 Moayyed MZ, Elata D, Hsieh J, Chen JWP, Quevy EP, Howe RT. Fully differential internal electrostatic transduction of a lamé-mode resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 931-934. DOI: 10.1109/MEMSYS.2009.4805537  1
2009 Graham AB, Messana M, Hartwell P, Provinel J, Yoneoka S, Kim B, Melamud R, Howe RT, Kenny TW. Wafer scale encapsulation of large lateral deflection MEMS structures Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 745-748. DOI: 10.1109/MEMSYS.2009.4805490  1
2009 Chen KL, Chandrahalim H, Grahaml AB, Bhave SA, Howe RT, Kenny TW. Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 23-26. DOI: 10.1109/MEMSYS.2009.4805309  1
2009 Jung IW, Park B, Provine J, Howe RT, Solgaard O. Photonic crystal fiber tip sensor for precision temperature sensing Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 761-762. DOI: 10.1109/LEOS.2009.5343346  1
2009 Chong S, Akarvardar K, Parsa R, Yoon JB, Howe RT, Mitra S, Wong HSP. Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage Ieee/Acm International Conference On Computer-Aided Design, Digest of Technical Papers, Iccad. 478-484.  1
2009 Zangle TA, Kant R, Howe RT, Santiago JG. Microfluidic device with integrated nanopores for protein detection Proceedings of Conference, Microtas 2009 - the 13th International Conference On Miniaturized Systems For Chemistry and Life Sciences. 706-708.  1
2008 Roper CS, Howe RT, Maboudian R. Large-scale polycrystalline SiC micromachining technologies Ecs Transactions. 16: 63-71. DOI: 10.1149/1.2992229  1
2008 Roper CS, Radmilovic V, Howe RT, Maboudian R. Effects of annealing on residual stress and strain gradient of doped polycrystalline SiC thin films Electrochemical and Solid-State Letters. 11: D35-D37. DOI: 10.1149/1.2831906  1
2008 Akarvardar K, Eggimann C, Tsamados D, Chauhan YS, Wan GC, Ionescu AM, Howe RT, Wong HSP. Analytical modeling of the suspended-gate FET and design insights for low-power logic Ieee Transactions On Electron Devices. 55: 48-59. DOI: 10.1109/Ted.2007.911070  1
2008 Provine J, Roper C, Schuller JA, Brongersma ML, Maboudian R, Howe RT. The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions 2008 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Opt Mems. 182-183. DOI: 10.1109/OMEMS.2008.4607889  1
2008 Arellano N, Quévy EP, Provine J, Maboudian R, Howe RT. Silicon nanowire coupled micro-resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 721-724. DOI: 10.1109/MEMSYS.2008.4443758  1
2008 Fedder GK, Howe RT, Liu TJK, Quévy EP. Technologies for cofabricating MEMS and electronics Proceedings of the Ieee. 96: 306-322. DOI: 10.1109/JPROC.2007.911064  1
2008 Akarvardar K, Elata D, Howe RT, Philip Wong HS. Energy-reversible complementary NEM logic gates Device Research Conference - Conference Digest, Drc. 69-70. DOI: 10.1109/DRC.2008.4800738  1
2008 Kim S, Kant R, Hadzialic S, Howe RT, Solgaard O. Interface quality control of monolithic photonic crystals by hydrogen annealing 2008 Conference On Quantum Electronics and Laser Science Conference On Lasers and Electro-Optics, Cleo/Qels. DOI: 10.1109/CLEO.2008.4551093  1
2008 Roper CS, Radmilovic V, Howe RT, Maboudian R. Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane Journal of Applied Physics. 103. DOI: 10.1063/1.2907871  1
2008 Zhang J, Zimmer JW, Howe RT, Maboudian R. Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications Diamond and Related Materials. 17: 23-28. DOI: 10.1016/J.Diamond.2007.09.010  1
2007 Paulo AS, Arellano N, Plaza JA, He R, Carraro C, Maboudian R, Howe RT, Bokor J, Yang P. Suspended mechanical structures based on elastic silicon nanowire arrays. Nano Letters. 7: 1100-4. PMID 17375964 DOI: 10.1021/Nl062877N  1
2007 Lee D, Sun X, Quevy E, Howe RT, Liu TJK. WetFET - A novel fluidic gate-dielectric transistor for sensor applications International Symposium On Vlsi Technology, Systems, and Applications, Proceedings. DOI: 10.1109/VTSA.2007.378947  1
2007 Chandrahalim H, Bhave SA, Quévy EP, Howe RT. Aqueous transduction of poly-sige disk resonators Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 313-316. DOI: 10.1109/SENSOR.2007.4300131  1
2007 Provine J, Catrysse PB, Roper C, Maboudian R, Fan S, Howe RT. Extraordinary transmission through a poly-SiC membrane with subwavelength hole arrays 2007 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Omens. 157-158. DOI: 10.1109/OMEMS.2007.4373888  1
2007 Provine J, Kant R, Horsley DA, Howe RT. Effect of a vertical stack of aligned subwavelength metal hole arrays on extraordinary transmission spectra 2007 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Omens. 117-118. DOI: 10.1109/OMEMS.2007.4373868  1
2007 Provine J, Catrysse PB, Roper CS, Maboudian R, Fan S, Howe RT. Phonon polariton reflectance spectra in a silicon carbide membrane hole array Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 466-467. DOI: 10.1109/LEOS.2007.4382481  1
2007 Low CW, Liu TJK, Howe RT. Characterization of polycrystalline silicon-germanium film deposition for modularly integrated MEMS applications Journal of Microelectromechanical Systems. 16: 68-77. DOI: 10.1109/Jmems.2006.886030  1
2007 Akarvardar K, Elata D, Parsa R, Wan GC, Yoo K, Provine J, Peumans P, Howe RT, Wong HSP. Design considerations for complementary nanoelectromechanical logic gates Technical Digest - International Electron Devices Meeting, Iedm. 299-302. DOI: 10.1109/IEDM.2007.4418930  1
2007 Zhang J, Carraro C, Howe RT, Maboudian R. Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments Surface and Coatings Technology. 201: 8893-8898. DOI: 10.1016/J.Surfcoat.2007.05.007  1
2007 Zhang J, Howe RT, Maboudian R. Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide Materials Science and Engineering B: Solid-State Materials For Advanced Technology. 139: 235-239. DOI: 10.1016/J.Mseb.2007.03.006  1
2007 San Paulo A, Quevy E, Black J, Howe RT, White R, Bokor J. Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy Microelectronic Engineering. 84: 1354-1357. DOI: 10.1016/J.Mee.2007.01.223  1
2006 Roper CS, Carraro C, Howe RT, Maboudian R. Silicon carbide thin films using 1,3-disilabutane single precursor for MEMS applications-A review Ecs Transactions. 3: 267-280. DOI: 10.1149/1.2357267  1
2006 Low CW, Liu TJK, Howe RT. Study of poly-SiGe structural properties for modularly integrated MEMS Ecs Transactions. 3: 1131-1142. DOI: 10.1149/1.2355907  1
2006 Roper CS, Radmilovic V, Howe RT, Maboudian R. Single-source chemical vapor deposition of SiC films in a large-scale low-pressure CVD growth, chemical, and mechanical characterization reactor Journal of the Electrochemical Society. 153: C562-C566. DOI: 10.1149/1.2208911  1
2006 Zhang J, Howe RT, Maboudian R. Electrical characterization of n-type polycrystalline 3C-silicon carbide thin films deposited by 1,3-disilabutane Journal of the Electrochemical Society. 153: G548-G551. DOI: 10.1149/1.2188327  1
2006 Srikantha Phani A, Seshia AA, Palaniapan M, Howe RT, Yasaitis JA. Modal coupling in micromechanical vibratory rate gyroscopes Ieee Sensors Journal. 6: 1144-1152. DOI: 10.1109/Jsen.2006.881432  1
2006 Roper CS, Howe RT, Maboudian R. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors Journal of Micromechanics and Microengineering. 16: 2736-2739. DOI: 10.1088/0960-1317/16/12/029  1
2006 Zhang J, Howe RT, Maboudian R. Control of strain gradient in doped polycrystalline silicon carbide films through tailored doping Journal of Micromechanics and Microengineering. 16: L1-L5. DOI: 10.1088/0960-1317/16/10/L01  1
2006 Gao D, Carraro C, Howe RT, Maboudian R. Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS Tribology Letters. 21: 226-232. DOI: 10.1007/S11249-006-9024-9  1
2006 Quévy EP, San Paulo A, Basol E, Howe RT, King TJ, Bokor J. Back-end-of-line poly-SiGe disk resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 234-237.  1
2006 Quévy EP, Howe RT, King TJ. Reconstituted wafer technology for heterogeneous integration Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 302-305.  1
2006 Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable monodisperse double emulsions for templated silica particles Micro Total Analysis Systems - Proceedings of Microtas 2006 Conference: 10th International Conference On Miniaturized Systems For Chemistry and Life Sciences. 230-232.  1
2005 Gao D, He R, Carraro C, Howe RT, Yang P, Maboudian R. Selective growth of Si nanowire arrays via galvanic displacement processes in water-in-oil microemulsions. Journal of the American Chemical Society. 127: 4574-5. PMID 15796513 DOI: 10.1021/Ja043645Y  1
2005 Takeuchi H, Wung A, Sun X, Howe RT, King TJ. Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices Ieee Transactions On Electron Devices. 52: 2081-2086. DOI: 10.1109/Ted.2005.854287  1
2005 Bhave SA, Howe RT. Silicon nitride-on-silicon bar resonator using internal electrostatic transduction Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 2139-2142. DOI: 10.1109/SENSOR.2005.1497527  1
2005 Koyama T, Bindel DS, Wei H, Quévy EP, Govindjee S, Demmel JW, Howe RT. Simulation tools for damping in high frequency resonators Proceedings of Ieee Sensors. 2005: 349-352. DOI: 10.1109/ICSENS.2005.1597708  1
2005 Paulo AS, Bokor J, Howe RT, He R, Yang P, Gao D, Carraro C, Maboudian R. Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method Applied Physics Letters. 87. DOI: 10.1063/1.2008364  1
2005 Kam H, Lee DT, Howe RT, King TJ. A new Nano-electro-mechanical Field Effect Transistor (NEMFET) design for low-power electronics Technical Digest - International Electron Devices Meeting, Iedm. 2005: 463-466.  1
2005 Quévy EP, Howe RT. Redundant MEMS resonators for precise reference oscillators Digest of Papers - Ieee Radio Frequency Integrated Circuits Symposium. 113-116.  1
2005 Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable emulsions for templated monodisperse silica Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 1473-1476.  1
2005 Bhave SA, Gao D, Maboudian R, Howe RT. Fully-differential poly-SiC lamé-mode resonator and checkerboard filter Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 223-226.  1
2005 Bindel DS, Quévy E, Koyama T, Govindjee S, Demmel JW, Howe RT. Anchor loss simulation in resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 133-136.  1
2004 Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 86: 485-90. PMID 15146839  1
2004 Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 85: 376-81. PMID 14755555 DOI: 10.1002/Bit.10835  1
2004 Low CW, Bircumshaw BL, Dorofeeva T, Solomon G, King TJ, Howe RT. Stress stability of poly-SiGe and various oxide films in humid environments Materials Research Society Symposium Proceedings. 854: 22-27. DOI: 10.1557/Proc-854-U3.3  1
2004 Sedky S, Schroeder J, Sands T, King TJ, Howe RT. Effect of excimer laser annealing on the structural properties of silicon germanium films Journal of Materials Research. 19: 3503-3511. DOI: 10.1557/Jmr.2004.0450  1
2004 Wijesundara MBJ, Valente G, Ashurst WR, Howe RT, Pisano AP, Carraro C, Maboudian R. Single-Source Chemical Vapor Deposition of 3C-SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization Journal of the Electrochemical Society. 151: C210-C214. DOI: 10.1149/1.1646141  1
2004 Quévy EP, King TJ, Howe RT. Integrated Poly-SiGe nanomechanical resonators for wireless sensor nodes Proceedings of Spie - the International Society For Optical Engineering. 5593: 368-377. DOI: 10.1117/12.573034  1
2004 Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Transformer coupled plasma etching of 3C-SiC films using fluorinated chemistry for microelectromechanical systems applications Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 513-518. DOI: 10.1116/1.1648067  1
2004 Bircumshaw BL, Wasilik ML, Kim EB, Su YR, Takeuchi H, Low CW, Liu G, Pisano AP, King TJ, Howe RT. Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519. DOI: 10.1109/MEMSYS.2003.1189799  1
2004 Takeuchi H, Quévy E, Bhave SA, King TJ, Howe RT. Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators Ieee Electron Device Letters. 25: 529-531. DOI: 10.1109/Led.2004.831898  1
2004 Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology Ieee Sensors Journal. 4: 441-448. DOI: 10.1109/Jsen.2004.828859  1
2004 Gao D, Carraro C, Radmilovic V, Howe RT, Maboudian R. Fracture of polycrystalline 3C-SiC films in microelectromechanical systems Journal of Microelectromechanical Systems. 13: 972-976. DOI: 10.1109/Jmems.2004.838372  1
2004 Sedky S, Howe RT, King TJ. Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in Poly-SiGe MEMS structures Journal of Microelectromechanical Systems. 13: 669-675. DOI: 10.1109/Jmems.2004.832189  1
2004 Scott KL, Hirano T, Yang H, Singh H, Howe RT, Niknejad AM. High-performance inductors using capillary based fluidic self-assembly Journal of Microelectromechanical Systems. 13: 300-309. DOI: 10.1109/Jmems.2003.823234  1
2004 Muhlstein CL, Howe RT, Ritchie RO. Fatigue of polycrystalline silicon for microelectromechanical system applications: Crack growth and stability under resonant loading conditions Mechanics of Materials. 36: 13-33. DOI: 10.1016/S0167-6636(03)00028-0  1
2004 Eyoum MA, Quevy E, Takeuchi H, King TJ, Howe RT. Ashing technique for nano-gap fabrication of electrostatic transducers Materials Research Society Symposium Proceedings. 145-147.  1
2004 Low CW, Wasilik ML, Takeuchi H, King TJ, Howe RT. In-situ doped poly-sige LPCVD process using BCL3 for post-cmos integration of MEMS devices Proceedings - Electrochemical Society. 7: 1021-1032.  1
2004 Phani AS, Seshia AA, Palaniapan M, Howe RT, Yasaitis J. Coupling of resonant modes in micromechanical vibratory rate gyroscopes 2004 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2004. 2: 335-338.  1
2003 Lin BCY, King TJ, Howe RT. Optimization of poly-SiGe deposition processes for modular MEMS integration Materials Research Society Symposium - Proceedings. 782: 43-48. DOI: 10.1557/Proc-782-A2.4  1
2003 Riehl PS, Scott KL, Muller RS, Howe RT, Yasaitis JA. Electrostatic charge and field sensors based on micromechanical resonators Journal of Microelectromechanical Systems. 12: 577-589. DOI: 10.1109/Jmems.2003.818066  1
2003 Maharbiz MM, Holtz WJ, Sharifzadeh S, Keasling JD, Howe RT. A microfabricated electrochemical oxygen generator for high-density cell culture arrays Journal of Microelectromechanical Systems. 12: 590-599. DOI: 10.1109/Jmems.2003.815828  1
2002 Srinivasan U, Helmbrecht MA, Rembe C, Muller RS, Howe RT. Fluidic self-assembly of micromirrors onto microactuators using capillary forces Ieee Journal On Selected Topics in Quantum Electronics. 8: 4-11. DOI: 10.1109/2944.991393  1
2002 Stoldt CR, Carraro C, Ashurst WR, Gao D, Howe RT, Maboudian R. A low-temperature CVD process for silicon carbide MEMS Sensors and Actuators, a: Physical. 97: 410-415. DOI: 10.1016/S0924-4247(01)00810-X  1
2002 Wijesundara MBJ, Stoldt CR, Carraro C, Howe RT, Maboudian R. Nitrogen doping of polycrystalline 3C-SiC films grown by single-source chemical vapor deposition Thin Solid Films. 419: 69-75. DOI: 10.1016/S0040-6090(02)00782-4  1
2001 Srinivasan U, Liepmann D, Howe RT. Microstructure to substrate self-assembly using capillary forces Journal of Microelectromechanical Systems. 10: 17-24. DOI: 10.1109/84.911087  1
2000 Hui EE, Howe RT, Rodgers MS. Single-step assembly of complex 3-D microstructures Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 602-607.  1
1998 Srinivasan U, Houston MR, Howe RT, Maboudian R. Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines Journal of Microelectromechanical Systems. 7: 252-259. DOI: 10.1109/84.679393  1
1996 Fedder GK, Howe RT. Multimode digital control of a suspended polysilicon microstructure Journal of Microelectromechanical Systems. 5: 283-297. DOI: 10.1109/84.546408  1
1994 Bustillo JM, Fedder GK, Nguyen CTC, Howe RT. Process technology for the modular integration of CMOS and polysilicon microstructures Microsystem Technologies. 1: 30-41. DOI: 10.1007/Bf01367758  1
1991 Moroney RM, White RM, Howe RT. Microtransport induced by ultrasonic Lamb waves Applied Physics Letters. 59: 774-776. DOI: 10.1063/1.105339  1
1989 Howe RT. Microsensor and microactuator applications of thin films Thin Solid Films. 181: 235-243. DOI: 10.1016/0040-6090(89)90490-2  1
1988 Schmidt MA, Senturia SD, Howe RT, Haritonidis JH. Design and Calibration of a Microfabricated FloatingElement Shear Stress Sensor Ieee Transactions On Electron Devices. 35: 750-757. DOI: 10.1109/16.2527  1
1987 Allen MG, Mehregany M, Howe RT, Senturia SD. Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films Applied Physics Letters. 51: 241-243. DOI: 10.1063/1.98460  1
1987 Mehregany M, Howe RT, Senturia SD. Novel microstructures for the in situ measurement of mechanical properties of thin films Journal of Applied Physics. 62: 3579-3584. DOI: 10.1063/1.339285  1
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