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Carrie Wing-Zin Low - Publications

Affiliations: 
2007 University of California, Berkeley, Berkeley, CA, United States 
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5 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2007 Low CW, Liu TJK, Howe RT. Characterization of polycrystalline silicon-germanium film deposition for modularly integrated MEMS applications Journal of Microelectromechanical Systems. 16: 68-77. DOI: 10.1109/Jmems.2006.886030  0.505
2006 Low CW, Liu TJK, Howe RT. Study of poly-SiGe structural properties for modularly integrated MEMS Ecs Transactions. 3: 1131-1142. DOI: 10.1149/1.2355907  0.399
2004 Low CW, Bircumshaw BL, Dorofeeva T, Solomon G, King TJ, Howe RT. Stress stability of poly-SiGe and various oxide films in humid environments Materials Research Society Symposium Proceedings. 854: 22-27. DOI: 10.1557/Proc-854-U3.3  0.515
2004 Bircumshaw BL, Wasilik ML, Kim EB, Su YR, Takeuchi H, Low CW, Liu G, Pisano AP, King TJ, Howe RT. Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519. DOI: 10.1109/MEMSYS.2003.1189799  0.472
2004 Low CW, Wasilik ML, Takeuchi H, King TJ, Howe RT. In-situ doped poly-sige LPCVD process using BCL3 for post-cmos integration of MEMS devices Proceedings - Electrochemical Society. 7: 1021-1032.  0.403
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