Year |
Citation |
Score |
2013 |
Maboudian R, Carraro C, Senesky DG, Roper CS. Advances in silicon carbide science and technology at the micro- and nanoscales Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 31. DOI: 10.1116/1.4807902 |
0.568 |
|
2013 |
Maloney KJ, Roper CS, Jacobsen AJ, Carter WB, Valdevit L, Schaedler TA. Microlattices as architected thin films: Analysis of mechanical properties and high strain elastic recovery Apl Materials. 1. DOI: 10.1063/1.4818168 |
0.33 |
|
2012 |
Roper CS, Gutés A, Carraro C, Howe RT, Maboudian R. Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration. Nanotechnology. 23: 225303. PMID 22572054 DOI: 10.1088/0957-4484/23/22/225303 |
0.631 |
|
2012 |
Broderick SR, Suh C, Provine J, Roper CS, Maboudian R, Howe RT, Rajan K. Application of principal component analysis to a full profile correlative analysis of FTIR spectra Surface and Interface Analysis. 44: 365-371. DOI: 10.1002/Sia.3813 |
0.649 |
|
2011 |
Liu F, Roper CS, Chu J, Carraro C, Maboudian R. Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes Sensors and Actuators, a: Physical. 166: 201-206. DOI: 10.1016/J.Sna.2010.02.024 |
0.553 |
|
2010 |
Yoneoka S, Roper CS, Candler RN, Chandorkar SA, Graham AB, Provine J, Maboudian R, Howe RT, Kenny TW. Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC Journal of Microelectromechanical Systems. 19: 357-366. DOI: 10.1109/Jmems.2010.2040460 |
0.664 |
|
2009 |
Roper CS, Howe RT, Maboudian R. Room-temperature wet etching of polycrystalline and nanocrystalline silicon carbide thin films with hf and hn O3 Journal of the Electrochemical Society. 156: D104-D107. DOI: 10.1149/1.3061944 |
0.69 |
|
2009 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Electrical and mechanical characterization of doped and annealed polycrystalline 3C-SiC thin films Journal of the Electrochemical Society. 156: D5-D10. DOI: 10.1149/1.3000002 |
0.667 |
|
2009 |
Roper CS, Candler R, Yoneoka S, Kenny T, Howe RT, Maboudian R. Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1031-1034. DOI: 10.1109/SENSOR.2009.5285964 |
0.612 |
|
2009 |
Liu F, Laboriante I, Bush B, Roper CS, Carraro C, Maboudian R. 2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1521-1524. DOI: 10.1109/SENSOR.2009.5285804 |
0.64 |
|
2009 |
Liu F, Roper CS, Carraro C, Maboudian R. Effect of electrode geometry and surface passivation on corrosion of polycrystalline silicon under high relative humidity and bias Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 611-614. DOI: 10.1109/MEMSYS.2009.4805456 |
0.496 |
|
2009 |
Liu F, Roper CS, Laboriante I, Bush B, Chu JR, Carraro C, Maboudian R. Anodic oxidation of polycrystalline 3C-silicon carbide thin films during MEMS operation Journal of Micromechanics and Microengineering. 19. DOI: 10.1088/0960-1317/19/3/035024 |
0.701 |
|
2009 |
Liu F, Laboriante I, Bush B, Roper CS, Carraro C, Maboudian R. In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument Applied Physics Letters. 95. DOI: 10.1063/1.3238282 |
0.672 |
|
2008 |
Rosso M, Arafat A, Schroën K, Giesbers M, Roper CS, Maboudian R, Zuilhof H. Covalent attachment of organic monolayers to silicon carbide surfaces. Langmuir : the Acs Journal of Surfaces and Colloids. 24: 4007-12. PMID 18324867 DOI: 10.1021/La704002Y |
0.547 |
|
2008 |
Roper CS, Howe RT, Maboudian R. Large-scale polycrystalline SiC micromachining technologies Ecs Transactions. 16: 63-71. DOI: 10.1149/1.2992229 |
0.574 |
|
2008 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Effects of annealing on residual stress and strain gradient of doped polycrystalline SiC thin films Electrochemical and Solid-State Letters. 11: D35-D37. DOI: 10.1149/1.2831906 |
0.664 |
|
2008 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane Journal of Applied Physics. 103. DOI: 10.1063/1.2907871 |
0.656 |
|
2007 |
Provine J, Catrysse PB, Roper CS, Maboudian R, Fan S, Howe RT. Phonon polariton reflectance spectra in a silicon carbide membrane hole array Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 466-467. DOI: 10.1109/LEOS.2007.4382481 |
0.579 |
|
2006 |
Roper CS, Carraro C, Howe RT, Maboudian R. Silicon carbide thin films using 1,3-disilabutane single precursor for MEMS applications-A review Ecs Transactions. 3: 267-280. DOI: 10.1149/1.2357267 |
0.655 |
|
2006 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Single-source chemical vapor deposition of SiC films in a large-scale low-pressure CVD growth, chemical, and mechanical characterization reactor Journal of the Electrochemical Society. 153: C562-C566. DOI: 10.1149/1.2208911 |
0.691 |
|
2006 |
Roper CS, Howe RT, Maboudian R. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors Journal of Micromechanics and Microengineering. 16: 2736-2739. DOI: 10.1088/0960-1317/16/12/029 |
0.668 |
|
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