Thomas W. Kenny - Publications

Affiliations: 
Stanford University, Palo Alto, CA 

284 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2020 Vukasin GD, Sanchez VK, Glaze J, Bousse NE, Bissel N, Shin DD, Kwon H, Heinz D, Yen ET-, Kenny TW. Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator Ieee\/Asme Journal of Microelectromechanical Systems. 1-7. DOI: 10.1109/Jmems.2020.3012925  0.92
2020 Kwon H, Vukasin GD, Bousse NE, Kenny TW. JMEMS Letters Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness Ieee\/Asme Journal of Microelectromechanical Systems. 1-2. DOI: 10.1109/Jmems.2020.3012109  0.92
2020 Bousse NE, Miller JML, Alter AL, Cameron CP, Kwon H, Vukasin GD, Kenny TW. Negative Nonlinear Dissipation in Microelectromechanical Beams Ieee\/Asme Journal of Microelectromechanical Systems. 1-6. DOI: 10.1109/Jmems.2020.3006800  0.92
2020 Alter AL, Flader IB, Chen Y, Shin DD, Kenny TW. Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes Ieee\/Asme Journal of Microelectromechanical Systems. 1-3. DOI: 10.1109/Jmems.2020.3005323  0.64
2020 Alter AL, Gerrard DD, Kwon H, Vukasin GD, Kenny TW. Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators Ieee\/Asme Journal of Microelectromechanical Systems. 1-3. DOI: 10.1109/Jmems.2020.3004748  0.92
2020 Mohammadi Z, Heugel T, Miller J, Shin D, Kwon R, Kenny T, Chitra R, Zilberberg O, Villanueva LG. On the effect of linear feedback and parametric pumping on a resonator’s frequency stability New Journal of Physics. DOI: 10.1088/1367-2630/Abb1Dd  0.56
2020 Miller JML, Shin DD, Kwon H, Shaw SW, Kenny TW. Spectral narrowing of parametrically pumped thermomechanical noise Applied Physics Letters. 117: 33504. DOI: 10.1063/5.0009848  0.92
2019 Zhou X, Zhao C, Xiao D, Sun J, Sobreviela G, Gerrard DD, Chen Y, Flader I, Kenny TW, Wu X, Seshia AA. Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators. Nature Communications. 10: 4980. PMID 31672971 DOI: 10.1038/S41467-019-12796-0  0.64
2019 Rodriguez J, Chandorkar SA, Watson CA, Glaze GM, Ahn CH, Ng EJ, Yang Y, Kenny TW. Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator. Scientific Reports. 9: 2244. PMID 30783192 DOI: 10.1038/S41598-019-38847-6  1
2019 Kim HJ, Kaplan K, Schindler P, Xu S, Winterkorn MM, Heinz D, English T, Provine J, Prinz FB, Kenny T. Electrical Properties of Ultrathin Platinum films by Plasma Enhanced Atomic Layer Deposition. Acs Applied Materials & Interfaces. PMID 30707831 DOI: 10.1021/Acsami.8B21054  0.64
2019 Flader IB, Chen Y, Yang Y, Ng EJ, Shin DD, Heinz DB, Ortiz LC, Alter AL, Park W, Goodson KE, Kenny TW. Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity Ieee\/Asme Journal of Microelectromechanical Systems. 28: 372-381. DOI: 10.1109/Jmems.2019.2900761  0.84
2018 Ortiz LC, Heinz DB, Flader IB, Alter AL, Shin DD, Chen Y, Kenny TW. Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography Mrs Communications. 8: 275-282. DOI: 10.1557/Mrc.2018.70  0.64
2018 Pishchalnikov YA, Behnke-Parks W, Maeda K, Colonius T, Mellema M, Hopcroft M, Luong A, Wiener S, Stoller ML, Kenny T, Laser DJ. Experimental observations and numerical modeling of lipid-shell microbubbles with calcium-adhering moieties for minimally-invasive treatment of urinary stones. Journal of the Acoustical Society of America. 144: 1781-1781. DOI: 10.1121/1.5067871  0.92
2018 Rodriguez J, Chandorkar SA, Glaze GM, Gerrard DD, Chen Y, Heinz DB, Flader IB, Kenny TW. Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators Ieee\/Asme Journal of Microelectromechanical Systems. 27: 800-809. DOI: 10.1109/Jmems.2018.2859958  1
2018 Miller JML, Zhu H, Heinz DB, Chen Y, Flader IB, Shin DD, Lee JE-, Kenny TW. Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator Physical Review Applied. 10: 44055. DOI: 10.1103/Physrevapplied.10.044055  0.64
2018 Miller JML, Ansari A, Heinz DB, Chen Y, Flader IB, Shin DD, Villanueva LG, Kenny TW. Effective quality factor tuning mechanisms in micromechanical resonators Applied Physics Reviews. 5: 41307. DOI: 10.1063/1.5027850  0.64
2018 Barako MT, English TS, Roy-Panzer S, Kenny TW, Goodson KE. Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide Thin Solid Films. 649: 24-29. DOI: 10.1016/J.Tsf.2018.01.019  0.84
2018 Mellema M, Behnke-Parks W, Luong A, Hopcroft M, Mills C, Ho S, Hsi R, Laser D, Kenny T, Grubbs R, Stoller M. PD22-11 ABSENCE OF URETERAL/RENAL INJURY FOLLOWING LOW INTENSITY EXTRACORPOREAL ACOUSTIC ENERGY LITHOTRIPSY WITH STONE-TARGETING MICROBUBBLES IN AN IN VIVO SWINE MODEL Journal of Urology. 199. DOI: 10.1016/J.Juro.2018.02.1179  0.92
2017 Chen Y, Flader IB, Shin DD, Ahn CH, Rodriguez J, Kenny TW. Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps Ieee\/Asme Journal of Microelectromechanical Systems. 26: 1235-1243. DOI: 10.1109/Jmems.2017.2758388  0.68
2017 Purkl F, Daus A, English TS, Provine J, Feyh A, Urban G, Kenny TW. Measurement of Young’s modulus and residual stress of atomic layer deposited Al2O3 and Pt thin films Journal of Micromechanics and Microengineering. 27: 85008. DOI: 10.1088/1361-6439/Aa73E6  0.52
2016 English TS, Provine J, Marshall AF, Koh AL, Kenny TW. Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops. Ultramicroscopy. 166: 39-47. PMID 27160487 DOI: 10.1016/J.Ultramic.2016.04.003  1
2016 Shoshani O, Heywood D, Yang Y, Kenny TW, Shaw SW. Phase Noise Reduction in an MEMS Oscillator Using a Nonlinearly Enhanced Synchronization Domain Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2016.2590881  1
2016 Yang Y, Ng EJ, Chen Y, Flader IB, Kenny TW. A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2016.2537829  1
2016 Polunin PM, Yang Y, Dykman MI, Kenny TW, Shaw SW. Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response Journal of Microelectromechanical Systems. 25: 297-303. DOI: 10.1109/Jmems.2016.2529296  0.44
2016 Heinz DB, Hong VA, Ahn CH, Ng EJ, Yang Y, Kenny TW. Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2016.2525008  1
2015 Barako MT, Roy-Panzer S, English TS, Kodama T, Asheghi M, Kenny TW, Goodson KE. Thermal Conduction in Vertically Aligned Copper Nanowire Arrays and Composites. Acs Applied Materials & Interfaces. 7: 19251-9. PMID 26284489 DOI: 10.1021/Acsami.5B05147  1
2015 Nitzan SH, Zega V, Li M, Ahn CH, Corigliano A, Kenny TW, Horsley DA. Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope. Scientific Reports. 5: 9036. PMID 25762243 DOI: 10.1038/Srep09036  1
2015 Ramaswamy K, Marx V, Laser D, Kenny T, Chi T, Bailey M, Sorensen MD, Grubbs RH, Stoller ML. Targeted microbubbles: a novel application for the treatment of kidney stones. Bju International. 116: 9-16. PMID 25402588 DOI: 10.1111/Bju.12996  1
2015 Polunin P, Yang Y, Atalaya J, Ng E, Strachan S, Shoshani O, Dykman M, Shaw S, Kenny T. Characterizing MEMS nonlinearities directly: The ring-down measurements 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 2176-2179. DOI: 10.1109/TRANSDUCERS.2015.7181391  1
2015 Soon BW, Qian Y, Ng EJ, Kenny TW, Lee C. Silicon-to-silicon microswitch with wide operation temperature range 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 2105-2108. DOI: 10.1109/TRANSDUCERS.2015.7181373  1
2015 Rodriguez J, Yang Y, Ahn CH, Chen Y, Ng EJ, Hong VA, Ghaffari S, Kenny TW. Damping mechanisms in light and heavy-doped dual-ring and double-ended tuning fork resonators (DETF) 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 2005-2008. DOI: 10.1109/TRANSDUCERS.2015.7181348  1
2015 Gerrard DD, Ng EJ, Ahn CH, Hong VA, Yang Y, Kenny TW. Modeling the effect of anchor geometry on the quality factor of bulk mode resonators 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 1997-2000. DOI: 10.1109/TRANSDUCERS.2015.7181346  1
2015 Yang Y, Ng EJ, Chen Y, Flader IB, Ahn CH, Hong VA, Kenny TW. A unified epi-seal process for resonators and inertial sensors 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 1326-1329. DOI: 10.1109/TRANSDUCERS.2015.7181176  0.44
2015 Hong VA, Stehle J, Ahn CH, Heinz DB, Yama G, Kim B, O'Brien GJ, Kenny TW. Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 295-298. DOI: 10.1109/TRANSDUCERS.2015.7180919  0.44
2015 Ahn CH, Hong VA, Park W, Yang Y, Chen Y, Ng EJ, Huynh J, Challoner AD, Goodson KE, Kenny TW. On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg) 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 39-42. DOI: 10.1109/TRANSDUCERS.2015.7180855  1
2015 Kenny TW, Bright VM. Welcome: To transducers 2015, the 18th international conference on solid-state sensors, actuators and microsystems 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. DOI: 10.1109/TRANSDUCERS.2015.7180835  0.44
2015 Yang Y, Ng E, Polunin P, Chen Y, Strachan S, Hong V, Ahn CH, Shoshani O, Shaw S, Dykman M, Kenny T. Experimental investigation on mode coupling of bulk mode silicon MEMS resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 1008-1011. DOI: 10.1109/MEMSYS.2015.7051132  1
2015 Chen Y, Ng EJ, Yang Y, Ahn CH, Flader I, Kenny TW. In-situ ovenization of Lamé-mode silicon resonators for temperature compensation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 809-812. DOI: 10.1109/MEMSYS.2015.7051082  1
2015 Heinz DB, Hong VA, Kimbrell TS, Stehle J, Ahn CH, Ng EJ, Yang Y, Yama G, O'Brien GJ, Kenny TW. Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 393-396. DOI: 10.1109/MEMSYS.2015.7050972  1
2015 Izyumin II, Kline MH, Yeh YC, Eminoglu B, Ahn CH, Hong VA, Yang Y, Ng EJ, Kenny TW, Boser BE. A 7ppm, 6°/hr frequency-output MEMS gyroscope Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 33-36. DOI: 10.1109/MEMSYS.2015.7050879  1
2015 Senkal D, Ng EJ, Hong V, Yang Y, Ahn CH, Kenny TW, Shkel AM. Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 29-32. DOI: 10.1109/MEMSYS.2015.7050878  1
2015 Ng E, Yang Y, Hong VA, Ahn CH, Heinz DB, Flader I, Chen Y, Everhart CLM, Kim B, Melamud R, Candler RN, Hopcroft MA, Salvia JC, Yoneoka S, Graham AB, ... ... Kenny TW, et al. The long path from MEMS resonators to timing products Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 1-2. DOI: 10.1109/MEMSYS.2015.7050869  1
2015 Ng EJ, Hong VA, Yang Y, Ahn CH, Everhart CLM, Kenny TW. Erratum to “Temperature Dependence of the Elastic Constants of Doped Silicon” [Jun 15 730-741] Ieee\/Asme Journal of Microelectromechanical Systems. 24: 2178-2178. DOI: 10.1109/Jmems.2015.2483373  0.68
2015 Ng EJ, Harrison KL, Yang Y, Ahn CH, Hong VA, Howe RT, Kenny TW. Stable Encapsulated Charge-Biased Resonators Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2483365  0.44
2015 Ahn CH, Ng EJ, Hong VA, Huynh J, Wang S, Kenny TW. Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2478034  0.44
2015 Soon BW, Qian Y, Ng EJ, Hong VA, Yang Y, Ahn CH, Kenny TW, Lee C. Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From -60 °C to 400 °C Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2451191  1
2015 Ghaffari S, Ng EJ, Ahn CH, Yang Y, Wang S, Hong VA, Kenny TW. Accurate modeling of quality factor behavior of complex silicon MEMS resonators Journal of Microelectromechanical Systems. 24: 276-288. DOI: 10.1109/Jmems.2014.2374451  1
2015 Roozeboom CL, Hill BE, Hong VA, Ahn CH, Ng EJ, Yang Y, Kenny TW, Hopcroft MA, Pruitt BL. Multifunctional Integrated Sensors for Multiparameter Monitoring Applications Journal of Microelectromechanical Systems. 24: 810-821. DOI: 10.1109/Jmems.2014.2349894  1
2015 Ng EJ, Hong VA, Yang Y, Ahn CH, Everhart CLM, Kenny TW. Temperature dependence of the elastic constants of doped silicon Journal of Microelectromechanical Systems. 24: 730-741. DOI: 10.1109/Jmems.2014.2347205  1
2015 Hong VA, Yoneoka S, Messana MW, Graham AB, Salvia JC, Branchflower TT, Ng EJ, Kenny TW. Fatigue experiments on single crystal silicon in an oxygen-free environment Journal of Microelectromechanical Systems. 24: 351-359. DOI: 10.1109/Jmems.2014.2331231  1
2015 Ahn CH, Ng EJ, Hong VA, Yang Y, Lee BJ, Flader I, Kenny TW. Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon Journal of Microelectromechanical Systems. 24: 343-350. DOI: 10.1109/Jmems.2014.2330590  1
2015 Ahn CH, Ng E, Hong VA, Huynh J, Kenny TW, Wang S. Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process 2nd Ieee International Symposium On Inertial Sensors and Systems, Ieee Isiss 2015 - Proceedings. DOI: 10.1109/ISISS.2015.7102392  1
2015 Taheri-Tehrani P, Izyumin O, Izyumin I, Ahn CH, Ng EJ, Hong VA, Yang Y, Kenny TW, Boser BE, Horsley DA. Disk resonator gyroscope with whole-angle mode operation 2nd Ieee International Symposium On Inertial Sensors and Systems, Ieee Isiss 2015 - Proceedings. DOI: 10.1109/ISISS.2015.7102360  1
2015 Flader IB, Ahn CH, Yang Y, Ng EJ, Hong VA, Baek J, Kenny TW. Tunable quality factor through 1:1 modal coupling in a disk resonator 2015 Ieee Sensors - Proceedings. DOI: 10.1109/ICSENS.2015.7370485  1
2015 Won Y, Gao Y, Guzman De Villoria R, Wardle BL, Xiang R, Maruyama S, Kenny TW, Goodson KE. Nonhomogeneous morphology and the elastic modulus of aligned carbon nanotube films Journal of Micromechanics and Microengineering. 25. DOI: 10.1088/0960-1317/25/11/115023  1
2015 Zega V, Nitzan S, Li M, Ahn CH, Ng E, Hong V, Yang Y, Kenny T, Corigliano A, Horsley DA. Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators Applied Physics Letters. 106. DOI: 10.1063/1.4922533  0.44
2015 Ghaffari S, Chandorkar SA, Wang S, Ng EJ, Ahn CH, Hong V, Yang Y, Kenny TW. CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators Scientific Reports. 4: 1-1. DOI: 10.1038/Srep04331  1
2014 Ng EJ, Yang Y, Hong VA, Ahn CH, Christensen DL, Gibson BA, Qalandar KR, Turner KL, Kenny TW. Stable pull-in electrodes for narrow gap actuation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1281-1284. DOI: 10.1109/MEMSYS.2014.6765883  1
2014 Ng EJ, Harrison KL, Everhart CL, Hong VA, Yang Y, Ahn CH, Heinz DB, Howe RT, Kenny TW. Stable charge-biased capacitive resonators with encapsulated switches Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1277-1280. DOI: 10.1109/MEMSYS.2014.6765882  1
2014 Nitzan S, Su TH, Ahn C, Ng E, Hong V, Yang Y, Kenny T, Horsley DA. Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 749-752. DOI: 10.1109/MEMSYS.2014.6765749  1
2014 Heinz DB, Hong VA, Ng EJ, Ahn CH, Yang Y, Kenny TW. Characterization of stiction forces in ultra-clean encapsulated MEMS devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 588-591. DOI: 10.1109/MEMSYS.2014.6765709  1
2014 Li M, Ng EJ, Hong VA, Ahn CH, Yang Y, Kenny TW, Horsley DA. Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 80-83. DOI: 10.1109/MEMSYS.2014.6765578  1
2014 Senkal D, Askari S, Ahamed MJ, Ng EJ, Hong V, Yang Y, Ahn CH, Kenny TW, Shkel AM. 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 24-27. DOI: 10.1109/MEMSYS.2014.6765564  1
2014 Soon BW, Ng EJ, Hong VA, Yang Y, Ahn CH, Qian Y, Kenny TW, Lee C. Fabrication and characterization of a vacuum encapsulated curved beam switch for harsh environment application Journal of Microelectromechanical Systems. 23: 1121-1130. DOI: 10.1109/Jmems.2014.2305754  1
2014 Ahn CH, Nitzan S, Ng EJ, Hong VA, Yang Y, Kimbrell T, Horsley DA, Kenny TW. Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump Applied Physics Letters. 105. DOI: 10.1063/1.4904468  1
2013 Won Y, Gao Y, Panzer MA, Xiang R, Maruyama S, Kenny TW, Cai W, Goodson KE. Zipping, entanglement, and the elastic modulus of aligned single-walled carbon nanotube films. Proceedings of the National Academy of Sciences of the United States of America. 110: 20426-30. PMID 24309375 DOI: 10.1073/Pnas.1312253110  1
2013 Ghaffari S, Chandorkar SA, Wang S, Ng EJ, Ahn CH, Hong V, Yang Y, Kenny TW. Quantum limit of quality factor in silicon micro and nano mechanical resonators. Scientific Reports. 3: 3244. PMID 24247809 DOI: 10.1038/Srep03244  1
2013 Philippine MA, Zareie H, Sigmund O, Rebeiz GM, Kenny TW. Topology optimized RF MEMS switches 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 2477-2480. DOI: 10.1109/Transducers.2013.6627308  1
2013 Ng EJ, Ahn CH, Yang Y, Hong VA, Chiang CF, Ahadi E, Ward MW, Kenny TW. Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 2419-2422. DOI: 10.1109/Transducers.2013.6627294  1
2013 Ahn CH, Ng EJ, Hong VA, Yang Y, Lee BJ, Ward MW, Kenny TW. Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1723-1726. DOI: 10.1109/Transducers.2013.6627119  1
2013 Purkl F, English TS, Yama G, Provine J, Samarao AK, Feyh A, Kim B, O'Brien G, Ambacher O, Howe RT, Kenny TW. Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1507-1510. DOI: 10.1109/Transducers.2013.6627067  1
2013 Hong VA, Lee BJ, Christensen DL, Heinz DB, Ng EJ, Ahn CH, Yang Y, Kenny TW. X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 618-621. DOI: 10.1109/Transducers.2013.6626842  1
2013 Christensen DL, Ahn CH, Hong VA, Ng EJ, Yang Y, Lee BJ, Kenny TW. Hermetically encapsulated differential resonant accelerometer 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 606-609. DOI: 10.1109/Transducers.2013.6626839  1
2013 Yang Y, Ng EJ, Ahn CH, Hong VA, Ahadi E, Kenny TW. Mechanical coupling of dual breathe-mode ring resonator 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 502-505. DOI: 10.1109/Transducers.2013.6626813  1
2013 Ng EJ, Chiang CF, Yang Y, Hong VA, Ahn CH, Kenny TW. Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 182-185. DOI: 10.1109/Transducers.2013.6626732  1
2013 Nitzan S, Ahn CH, Su TH, Li M, Ng EJ, Wang S, Yang ZM, O'Brien G, Boser BE, Kenny TW, Horsley DA. Epitaxially-encapsulated polysilicon disk resonator gyroscope Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 625-628. DOI: 10.1109/MEMSYS.2013.6474319  1
2013 Purkl F, English T, Yama G, Provine J, Samarao AK, Feyh A, O'Brien G, Ambacher O, Howe RT, Kenny TW. Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 185-188. DOI: 10.1109/MEMSYS.2013.6474208  1
2013 Chiang CF, Graham AB, Lee BJ, Ahn CH, Ng EJ, O'Brien GJ, Kenny TW. Resonant pressure sensor with on-chip temperature and strain sensors for error correction Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 45-48. DOI: 10.1109/MEMSYS.2013.6474172  1
2013 Ng EJ, Lee HK, Ahn CH, Melamud R, Kenny TW. Stability of silicon microelectromechanical systems resonant thermometers Ieee Sensors Journal. 13: 987-993. DOI: 10.1109/Jsen.2012.2227708  1
2013 Philippine MA, Zareie H, Sigmund O, Rebeiz GM, Kenny TW. Experimental validation of topology optimization for rf mems capacitive switch design Journal of Microelectromechanical Systems. 22: 1296-1309. DOI: 10.1109/Jmems.2013.2283241  1
2013 Philippine MA, Sigmund O, Rebeiz GM, Kenny TW. Topology optimization of stressed capacitive RF MEMS switches Journal of Microelectromechanical Systems. 22: 206-215. DOI: 10.1109/Jmems.2012.2224640  1
2013 Li M, Ng EJ, Hong VA, Ahn CH, Yang Y, Kenny TW, Horsley DA. Lorentz force magnetometer using a micromechanical oscillator Applied Physics Letters. 103. DOI: 10.1063/1.4826278  1
2013 Lee HK, Melamud R, Kim B, Chandorkar S, Salvia JC, Kenny TW. The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators Journal of Applied Physics. 114. DOI: 10.1063/1.4825327  1
2013 Hennessy RG, Shulaker MM, Messana M, Graham AB, Klejwa N, Provine J, Kenny TW, Howe RT. Vacuum encapsulated resonators for humidity measurement Sensors and Actuators, B: Chemical. 185: 575-581. DOI: 10.1016/J.Snb.2013.05.016  1
2013 Ghaffari S, Ahn CH, Ng EJ, Wang S, Kenny TW. Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators Microelectronics Journal. 44: 586-591. DOI: 10.1016/J.Mejo.2013.03.010  1
2012 Yoneoka S, Lee J, Liger M, Yama G, Kodama T, Gunji M, Provine J, Howe RT, Goodson KE, Kenny TW. Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness. Nano Letters. 12: 683-6. PMID 22224582 DOI: 10.1021/Nl203548W  1
2012 Ghaffari S, Kenny TW. Thermoelastic dissipation in composite silicon MEMS resonators with thin film silicon dioxide coating Materials Research Society Symposium Proceedings. 1426: 193-198. DOI: 10.1557/Opl.2012.1049  1
2012 English TS, Kenny TW, Smoyer JL, Baker CH, Le NQ, Duda JC, Norris PM, Hopkins PE. Anharmonic phonon dispersion relations, group velocities, and branch-dependent specific heat capacities measured directly from molecular dynamics simulations at finite temperatures Asme 2012 Heat Transfer Summer Conf. Collocated With the Asme 2012 Fluids Engineering Div. Summer Meeting and the Asme 2012 10th Int. Conf. On Nanochannels, Microchannels and Minichannels, Ht 2012. 1: 617-624. DOI: 10.1115/HT2012-58459  1
2012 Kim B, Melamud R, Candler RA, Hopcroft MA, Kenny TW. MEMS packaging for reliable resonators and oscillators Ieee Mtt-S International Microwave Symposium Digest. DOI: 10.1109/MWSYM.2012.6259391  1
2012 Chiang CF, Graham AB, O'Brien GJ, Kenny TW. A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 519-522. DOI: 10.1109/MEMSYS.2012.6170177  1
2012 Won Y, Gao Y, De Villoria RG, Wardle BL, Kenny TW, Goodson KE. Crust removal and effective modulus of aligned multi-walled carbon nanotube films Intersociety Conference On Thermal and Thermomechanical Phenomena in Electronic Systems, Itherm. 1070-1076. DOI: 10.1109/ITHERM.2012.6231543  1
2012 Seth S, Wang S, Kenny T, Murmann B. A 131-dBc/Hz, 20-MHz MEMS oscillator with a 6.9-mW, 69-kΩ, gain-tunable CMOS TIA European Solid-State Circuits Conference. 249-252. DOI: 10.1109/ESSCIRC.2012.6341332  1
2012 Duda JC, English TS, Piekos ES, Beechem TE, Kenny TW, Hopkins PE. Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities Journal of Applied Physics. 112. DOI: 10.1063/1.4757941  1
2012 Won Y, Lee J, Asheghi M, Kenny TW, Goodson KE. Phase and thickness dependent modulus of Ge 2Sb 2Te 5 films down to 25 nm thickness Applied Physics Letters. 100. DOI: 10.1063/1.3699227  1
2012 Won Y, Gao Y, Panzer MA, Dogbe S, Pan L, Kenny TW, Goodson KE. Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators Carbon. 50: 347-355. DOI: 10.1016/J.Carbon.2011.08.009  1
2012 Ghaffari S, Ahn CH, Ng EJ, Wang S, Kenny TW. Silicon crystal effects in modeling of MEMS silicon resonators Technical Proceedings of the 2012 Nsti Nanotechnology Conference and Expo, Nsti-Nanotech 2012. 594-597.  1
2012 Philippine MA, Sigmund O, Rebeiz GM, Kenny TW. Reduction of initial stress stiffening by topology optimization Dtip 2012 - Symposium On Design, Test, Integration and Packaging of Mems/Moems. 148-153.  1
2012 Hong VA, Yoneoka S, Messana MW, Graham AB, Salvia JC, Branchflower TT, Ng EJ, Kenny TW. High-stress fatigue experiments on single crystal silicon in an oxygen-free environment Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 453-456.  1
2012 Ng EJ, Wang S, Buchman D, Chiang CF, Kenny TW, Muenzel H, Fuertsch M, Marek J, Gomez UM, Yama G, O'Brien G. Ultra-stable epitaxial polysilicon resonators Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 271-274.  1
2012 Chiang CF, Graham AB, Ng EJ, Ahn CH, O'Brien GJ, Kenny TW. A novel, high-resolution resonant thermometer used for temperature compensation of a cofabricated pressure sensor Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 54-57.  1
2011 Hill GC, Soto DR, Peattie AM, Full RJ, Kenny TW. Orientation angle and the adhesion of single gecko setae. Journal of the Royal Society, Interface / the Royal Society. 8: 926-33. PMID 21288955 DOI: 10.1098/Rsif.2010.0720  1
2011 Bloschock KP, Schofield AR, Kenny TW. Tip-based nanofabrication: An approach to true nanotechnology Proceedings of Spie - the International Society For Optical Engineering. 8031. DOI: 10.1117/12.887266  1
2011 Wang S, Chandorkar SA, Graham AB, Messana MW, Salvia J, Kenny TW. Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 942-945. DOI: 10.1109/TRANSDUCERS.2011.5969668  1
2011 Lee HK, Ward PA, Duwel AE, Salvia JC, Qu YQ, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Kenny TW. Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 510-513. DOI: 10.1109/TRANSDUCERS.2011.5969667  1
2011 Lee HK, Melamud R, Chandorkar SA, Qu YQ, Salvia JC, Kim B, Hopcroft MA, Kenny TW. Influence of the A-F effect on the temperature stability of silicon micromechanical resonators 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 506-509. DOI: 10.1109/TRANSDUCERS.2011.5969666  1
2011 Chiang CF, Graham AB, Messana MW, Provine J, Buchman DT, O'Brien GJ, Kenny TW. Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 894-897. DOI: 10.1109/TRANSDUCERS.2011.5969187  1
2011 Chen KL, Wang S, Salvia JC, Melamud R, Howe RT, Kenny TW. Wafer-level epitaxial silicon packaging for out-of-plane RF MEMS resonators with integrated actuation electrodes Ieee Transactions On Components, Packaging and Manufacturing Technology. 1: 310-317. DOI: 10.1109/Tcpmt.2010.2100711  1
2011 Yoneoka S, Liger M, Yama G, Schuster R, Purkl F, Provine J, Prinz FB, Howe RT, Kenny TW. ALD-metal uncooled bolometer Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 676-679. DOI: 10.1109/MEMSYS.2011.5734515  1
2011 Lee HK, Melamud R, Chandorkar S, Salvia J, Yoneoka S, Kenny TW. Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime Journal of Microelectromechanical Systems. 20: 1228-1230. DOI: 10.1109/Jmems.2011.2170821  1
2011 Lee HK, Melamud R, Kim B, Hopcroft MA, Salvia JC, Kenny TW. Electrostatic tuning to achieve higher stability microelectromechanical composite resonators Journal of Microelectromechanical Systems. 20: 1355-1365. DOI: 10.1109/Jmems.2011.2168083  1
2011 Bahl G, Salvia JC, Melamud R, Kim B, Howe RT, Kenny TW. AC polarization for charge-drift elimination in resonant electrostatic MEMS and oscillators Journal of Microelectromechanical Systems. 20: 355-364. DOI: 10.1109/Jmems.2010.2100027  1
2011 Lewis E, Kenny T. Welcome message Proceedings of Ieee Sensors. lxxxiv-lxxxv. DOI: 10.1109/ICSENS.2011.6127422  1
2011 Ng EJ, Lee HK, Ahn CH, Melamud R, Kenny TW. Stability measurements of silicon MEMS resonant thermometers Proceedings of Ieee Sensors. 1257-1260. DOI: 10.1109/ICSENS.2011.6127252  1
2011 Lee HK, Melamud R, Chandorkar S, Qu YQ, Salvia J, Kenny TW. Motional impedance of resonators in the nonlinear regime Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977779  1
2011 Kyu Lee H, Kim B, Melamud R, Hopcroft MA, Salvia JC, Kenny TW. Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators Applied Physics Letters. 99. DOI: 10.1063/1.3660235  1
2011 Won Y, Wang EN, Goodson KE, Kenny TW. 3-D visualization of flow in microscale jet impingement systems International Journal of Thermal Sciences. 50: 325-331. DOI: 10.1016/J.Ijthermalsci.2010.08.005  1
2010 Won YJ, Lee JH, Wang EN, Goodson KE, Kenny TW. An optimization design for a MEMS fabricated jet impingement cooling device Proceedings of the Asme Interpack Conference 2009, Ipack2009. 1: 491-496. DOI: 10.1115/InterPACK2009-89257  1
2010 Bahl G, Salvia J, Bargatin I, Yoneoka S, Melamud R, Kim B, Chandorkar S, Hopcroft MA, Bahl R, Howe RT, Kenny TW. Charge-drift elimination in resonant electrostatic MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 108-111. DOI: 10.1109/MEMSYS.2010.5442555  1
2010 Yoneoka S, Qu YQ, Wang S, Messana MW, Graham AB, Salvia J, Kim B, Melamud R, Bahl G, Kenny TW. High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 224-227. DOI: 10.1109/MEMSYS.2010.5442524  1
2010 Qu YQ, Melamud R, Chandorkar S, Lee HK, Kenny TW. Stress relaxation study of sputtered platinum thin films at near room temperature using an ultra-sensitive strain gauge Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 548-551. DOI: 10.1109/MEMSYS.2010.5442445  1
2010 Lee HK, Salvia J, Bahl G, Melamud R, Yoneoka S, Qu YQ, Chandorkar S, Hopcroft MA, Kim B, Kenny TW. Influence of the temperature dependent A-F effect on the design and performance of MEMS oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 699-702. DOI: 10.1109/MEMSYS.2010.5442312  1
2010 Wang S, Chandorkar S, Salvia J, Melamud R, Qu YQ, Lee HK, Kenny TW. Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 715-718. DOI: 10.1109/MEMSYS.2010.5442308  1
2010 Lee HK, Yoneoka S, Bahl G, Salvia J, Qu YQ, Melamud R, Chandorkar S, Kim B, Hopcroft MA, Kenny TW. A novel characterization method for temperature compensation of composite resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 743-746. DOI: 10.1109/MEMSYS.2010.5442299  1
2010 Yoneoka S, Salvia JC, Bahl G, Melamud R, Chandorkar SA, Kenny TW. Active electrostatic compensation of micromechanical resonators under random vibrations Journal of Microelectromechanical Systems. 19: 1270-1272. DOI: 10.1109/Jmems.2010.2067444  1
2010 Yoneoka S, Roper CS, Candler RN, Chandorkar SA, Graham AB, Provine J, Maboudian R, Howe RT, Kenny TW. Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC Journal of Microelectromechanical Systems. 19: 357-366. DOI: 10.1109/Jmems.2010.2040460  1
2010 Hopcroft MA, Nix WD, Kenny TW. What is the Young's modulus of silicon? Journal of Microelectromechanical Systems. 19: 229-238. DOI: 10.1109/Jmems.2009.2039697  1
2010 Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274  1
2010 Salvia JC, Melamud R, Chandorkar SA, Lord SF, Kenny TW. Real-time temperature compensation of mems oscillators using an integrated micro-oven and a phase-locked loop Journal of Microelectromechanical Systems. 19: 192-201. DOI: 10.1109/Jmems.2009.2035932  1
2010 Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717  1
2010 Kenny T, Fedder G. Proceedings of IEEE Sensors: Forward Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2010.5689840  1
2010 Kim B, Melamud R, Candler RA, Hopcroft MA, Jha CM, Chandorkar S, Kenny TW. Encapsulated MEMS resonators- A technology path for MEMS into frequency control applications 2010 Ieee International Frequency Control Symposium, Fcs 2010. 1-4. DOI: 10.1109/FREQ.2010.5556386  1
2010 Soto D, Hill G, Parness A, Esparza N, Cutkosky M, Kenny T. Effect of fibril shape on adhesive properties Applied Physics Letters. 97. DOI: 10.1063/1.3464553  1
2009 Chen KL, Salvia J, Potter R, Howe RT, Kenny TW. Performance evaluation and equivalent model of silicon interconnects for fully-encapsulated RF MEMS devices Ieee Transactions On Advanced Packaging. 32: 402-409. DOI: 10.1109/Tadvp.2008.2005114  1
2009 Qu YQ, Melamud R, Kenny TW. Using encapsulated MEMS resonators to measure evolution in thin film stress Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1138-1141. DOI: 10.1109/SENSOR.2009.5285931  1
2009 Chen KL, Wang S, Salvia J, Howe RT, Kenny TW. Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1421-1424. DOI: 10.1109/SENSOR.2009.5285839  1
2009 Chen KL, Melamud R, Wang S, Kenny TW. An integrated solution for wafer-level packaging and electrostatic actuation of out-of-plane devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1071-1074. DOI: 10.1109/MEMSYS.2009.4805572  1
2009 Yoneoka S, Bahl G, Salvia J, Chen KL, Graham AB, Lee HK, Yama G, Candler RN, Kenny TW. Acceleration compensation of MEMS resonators using electrostatic tuning Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 805-808. DOI: 10.1109/MEMSYS.2009.4805505  1
2009 Graham AB, Messana M, Hartwell P, Provinel J, Yoneoka S, Kim B, Melamud R, Howe RT, Kenny TW. Wafer scale encapsulation of large lateral deflection MEMS structures Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 745-748. DOI: 10.1109/MEMSYS.2009.4805490  1
2009 Salvia J, Melamud R, Chandorkar S, Lee HK, Qu YQ, Lord SF, Murmann B, Kenny TW. Phase lock loop based temperature compensation for mems oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 661-664. DOI: 10.1109/MEMSYS.2009.4805469  1
2009 Chen KL, Chandrahalim H, Grahaml AB, Bhave SA, Howe RT, Kenny TW. Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 23-26. DOI: 10.1109/MEMSYS.2009.4805309  1
2009 Melamud R, Chandorkar SA, Kim B, Lee HK, Salvia JC, Bahl G, Hopcroft MA, Kenny TW. Temperature-insensitive composite micromechanical resonators Journal of Microelectromechanical Systems. 18: 1409-1419. DOI: 10.1109/Jmems.2009.2030074  1
2009 Chandorkar SA, Candler RN, Duwel A, Melamud R, Agarwal M, Goodson KE, Kenny TW. Multimode thermoelastic dissipation Journal of Applied Physics. 105. DOI: 10.1063/1.3072682  1
2009 Kim B, Candler RN, Melamud R, Hopcroft MA, Yoneoka S, Lee HK, Agarwal M, Chandorkar SA, Yama G, Kenny TW. Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems Journal of Applied Physics. 105. DOI: 10.1063/1.3054366  1
2009 Ayanoor-Vitikkate V, Chen Kl, Park WT, Kenny TW. Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices Sensors and Actuators, a: Physical. 156: 275-283. DOI: 10.1016/J.Sna.2009.09.001  1
2008 Kim HS, Liao HH, Hyun OS, Kenny TW. Variable thermal resistors (VTR) for thermal management of chip scale atomic clocks (CSAC) Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 852-855. DOI: 10.1109/MEMSYS.2008.4443790  1
2008 Kim B, Candler RN, Melamud R, Yoneoka S, Hyung KL, Yama G, Kenny TW. Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 104-107. DOI: 10.1109/MEMSYS.2008.4443603  1
2008 Chandorkar SA, Agarwal M, Melamud R, Candler RN, Goodson KE, Kenny TW. Limits of quality factor in bulk-mode micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 74-77. DOI: 10.1109/MEMSYS.2008.4443596  1
2008 Kim B, Hopcroft MA, Candler RN, Jha CM, Agarwal M, Melamud R, Chandorkar SA, Yama G, Kenny TW. Temperature dependence of quality factor in MEMS resonators Journal of Microelectromechanical Systems. 17: 755-766. DOI: 10.1109/Jmems.2008.924253  1
2008 Jha CM, Hopcroft MA, Chandorkar SA, Salvia JC, Agarwal M, Candler RN, Melamud R, Kim B, Kenny TW. Thermal isolation of encapsulated MEMS resonators Journal of Microelectromechanical Systems. 17: 175-184. DOI: 10.1109/Jmems.2007.904332  1
2008 Salvia J, Messana M, Ohline M, Hopcroft MA, Melamud R, Chandorkar S, Lee HK, Bahl G, Murmann B, Kenny TW. Exploring the limits and practicality of Q-based temperature compensation for silicon resonators Technical Digest - International Electron Devices Meeting, Iedm. DOI: 10.1109/IEDM.2008.4796783  1
2008 Jha CM, Salvia J, Chandorkar SA, Melamud R, Kuhl E, Kenny TW. Acceleration insensitive encapsulated silicon microresonator Applied Physics Letters. 93. DOI: 10.1063/1.3036536  1
2008 Agarwal M, Chandorkar SA, Mehta H, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Bahl G, Yama G, Kenny TW, Murmann B. A study of electrostatic force nonlinearities in resonant microstructures Applied Physics Letters. 92. DOI: 10.1063/1.2834707  1
2008 Swartwout M, Kitts C, Twiggs R, Kenny T, Ray Smith B, Lu R, Stattenfield K, Pranajaya F. Mission results for Sapphire, a student-built satellite Acta Astronautica. 62: 521-538. DOI: 10.1016/J.Actaastro.2008.01.009  1
2008 Chen KL, Wang S, Kenny TW. An advanced wafer-level packaging method for electrostatic actuated out-of-plane MEMS devices International Conference and Exhibition On Device Packaging 2009. 3: 1462-1493.  1
2007 Park WT, O'Connor KN, Chen KL, Mallon JR, Maetani T, Dalal P, Candler RN, Ayanoor-Vitikkate V, Roberson JB, Puria S, Kenny TW. Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids. Biomedical Microdevices. 9: 939-49. PMID 17574533 DOI: 10.1007/S10544-007-9072-4  1
2007 Kim HS, Song HO, Kenny TW. An improved method of thermal resistance measurement for variable thermal resistors 2007 Proceedings of the Asme Interpack Conference, Ipack 2007. 1: 249-253. DOI: 10.1115/IPACK2007-33879  1
2007 Kim B, Hopcroft MA, Melamud R, Jha CM, Agarwal M, Chandorkar SA, Kenny TW. CMOS compatible wafer-scale encapsulation with MEMS resonators 2007 Proceedings of the Asme Interpack Conference, Ipack 2007. 1: 499-504. DOI: 10.1115/IPACK2007-33234  1
2007 Hill GC, Soto DR, Lue SJ, Peattie AM, Full RJ, Kenny TW. Investigating the role of orientation angle on gecko setae adhesion using a dual-axis MEMS force sensor Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 2263-2266. DOI: 10.1109/SENSOR.2007.4300620  1
2007 Hopcroft MA, Lee HK, Kim B, Melamud R, Chandorkar S, Agarwal M, Jha CM, Salvia J, Bahl G, Mehta H, Kenny TW. A high-stability MEMS frequency reference Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1307-1309. DOI: 10.1109/SENSOR.2007.4300378  1
2007 Kim B, Hopcroft M, Jha CM, Melamud R, Chandorkar S, Agarwal M, Chen KL, Park WT, Candler R, Yama G, Partridge A, Lutz M, Kenny TW. Using MEMS to build the device and the package Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 331-334. DOI: 10.1109/SENSOR.2007.4300135  1
2007 Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. CMOS-compatible dual-resonator mems temperature sensor with milli-degree accuracy Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 229-232. DOI: 10.1109/SENSOR.2007.4300111  1
2007 Bartsch MS, Federle W, Full RJ, Kenny TW. A multiaxis force sensor for the study of insect biomechanics Journal of Microelectromechanical Systems. 16: 709-718. DOI: 10.1109/Jmems.2007.893677  1
2007 Agarwal M, Park KK, Candler RN, Kim B, Hopcroft MA, Chandorkar SA, Jha CM, Melamud R, Kenny TW, Murmann B. Nonlinear characterization of electrostatic MEMS resonators Proceedings of the Ieee International Frequency Control Symposium and Exposition. 209-212. DOI: 10.1109/FREQ.2006.275380  1
2007 Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators Journal of Applied Physics. 102. DOI: 10.1063/1.2785018  1
2007 Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. High resolution microresonator-based digital temperature sensor Applied Physics Letters. 91. DOI: 10.1063/1.2768629  1
2007 Hopcroft MA, Kim B, Chandorkar S, Melamud R, Agarwal M, Jha CM, Bahl G, Salvia J, Mehta H, Lee HK, Candler RN, Kenny TW. Using the temperature dependence of resonator quality factor as a thermometer Applied Physics Letters. 91. DOI: 10.1063/1.2753758  1
2007 Melamud R, Kim B, Chandorkar SA, Hopcroft MA, Agarwal M, Jha CM, Kenny TW. Temperature-compensated high-stability silicon resonators Applied Physics Letters. 90. DOI: 10.1063/1.2748092  1
2007 Agarwal M, Park KK, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Kenny TW, Murmann B. Acceleration sensitivity in beam-type electrostatic microresonators Applied Physics Letters. 90. DOI: 10.1063/1.2426884  1
2007 Kim B, Candler RN, Hopcroft MA, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators Sensors and Actuators, a: Physical. 136: 125-131. DOI: 10.1016/J.Sna.2006.10.040  1
2007 Ajakaiye O, Grade J, Shin C, Kenny T. Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers Sensors and Actuators, a: Physical. 134: 575-581. DOI: 10.1016/J.Sna.2005.07.028  1
2007 Melamud R, Kim B, Hopcroft MA, Chandorkar S, Agarwal M, Jha CM, Kenny TW. Composite flexural-mode resonator with controllable turnover temperature Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 199-202.  1
2007 Chandorkar SA, Mehta H, Agarwal M, Hopcroft MA, Jha CM, Candler RN, Yama G, Bahl G, Kim B, Melamud R, Goodson KE, Kenny TW. Non-isothermal micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 211-214.  1
2007 Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Impact of miniaturization on the current handling of electrostatic MEMS resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 783-786.  1
2006 Kenny TW, Goodson KE, Santiago JG, Wang E, Koo JMO, Jiang L, Pop E, Sinha S, Zhang L, Fogg D, Yao S, Flynn R, Chang CH, Hidrovo CH. Advanced cooling technologies for microprocessors International Journal of High Speed Electronics and Systems. 16: 301-313. DOI: 10.1142/S0129156406003655  1
2006 Jha CM, Hopcroft MA, Agarwal M, Chandorkar SA, Candler RN, Subramanian V, Melamud R, Bhat S, Kim B, Park KK, Kenny TW. In-chip device-layer thermal isolation of MEMS resonator for lower power budget American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. DOI: 10.1115/IMECE2006-15176  1
2006 Kim HS, Liao HH, Lee BH, Kenny TW. Design and verification of a low-powered pre-programmable in-package temperature controller American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. DOI: 10.1115/IMECE2006-15136  1
2006 Ayanoor-Vitikkate V, Chen KL, Park WT, Kenny TW. Development of process for wafer scale encapsulation of devices with very wide trenches American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. DOI: 10.1115/IMECE2006-14549  1
2006 Candler RN, Hopcroft MA, Kim B, Park WT, Melamud R, Agarwal M, Yama G, Partridge A, Lutz M, Kenny TW. Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators Journal of Microelectromechanical Systems. 15: 1446-1456. DOI: 10.1109/Jmems.2006.883586  1
2006 Duwel A, Candler RN, Kenny TW, Varghese M. Engineering MEMS resonators with low thermoelastic damping Journal of Microelectromechanical Systems. 15: 1437-1445. DOI: 10.1109/Jmems.2006.883573  1
2006 Candler RN, Duwel A, Varghese M, Chandorkar SA, Hopcroft MA, Park WT, Kim B, Yama G, Partridge A, Lutz M, Kenny TW. Impact of geometry on thermoelastic dissipation in micromechanical resonant beams Journal of Microelectromechanical Systems. 15: 927-934. DOI: 10.1109/Jmems.2006.879374  1
2006 Park WT, Partridge A, Candler RN, Ayanoor-Vitikkate V, Yama G, Lutz M, Kenny TW. Encapsulated submillimeter piezoresistive accelerometers Journal of Microelectromechanical Systems. 15: 507-514. DOI: 10.1109/Jmems.2006.876648  1
2006 Ayanoor-Vitikkate V, Chen KL, Park WT, Yama G, Kenny TW. Wafer scale encapsulation of wide gaps using oxidation of sacrificial beams Proceedings of the Ieee/Cpmt International Electronics Manufacturing Technology (Iemt) Symposium. 300-306. DOI: 10.1109/IEMT.2006.4456470  1
2006 Hidrovo CH, Kramer TA, Wang EN, Vigneron S, Steinbrenner JE, Koo JM, Wang FM, Fogg DW, Flynn RD, Lee ES, Cheng CH, Kenny TW, Eaton JK, Goodson KE. Two-phase microfluidics for semiconductor circuits and fuel cells Heat Transfer Engineering. 27: 53-63. DOI: 10.1080/01457630500523816  1
2006 Agarwal M, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Kenny TW, Murmann B. Optimal drive condition for nonlinearity reduction in electrostatic microresonators Applied Physics Letters. 89. DOI: 10.1063/1.2388886  1
2006 Wang EN, Devasenathipathy S, Lin H, Hidrovo CH, Santiago JG, Goodson KE, Kenny TW. A hybrid method for bubble geometry reconstruction in two-phase microchannels Experiments in Fluids. 40: 847-858. DOI: 10.1007/S00348-006-0123-Z  1
2006 Hopcroft MA, Agarwal M, Park KK, Kim B, Jha CM, Candler RN, Yama G, Murmann B, Kenny TW. Temperature compensation of a MEMS resonator using quality factor as a thermometer Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 222-225.  1
2006 Agarwal M, Park KK, Hopcroft M, Chandorkar S, Candler RN, Kim B, Melamud R, Yama G, Murmann B, Kenny TW. Effects of mechanical vibrations and bias voltage noise on phase noise of MEMS resonator based oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 154-157.  1
2005 Candler RN, Park WT, Hopcroft M, Kim B, Kenny TW. Hydrogen diffusion and pressure control of encapsulated mems resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 920-923. DOI: 10.1109/SENSOR.2005.1496568  1
2005 Candler RN, Hopcroft M, Low CW, Chandorkar S, Kim B, Varghese M, Duwel A, Kenny TW. Impact of slot location on thermoelastic dissipation in micromechanical resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 597-600. DOI: 10.1109/SENSOR.2005.1496488  1
2005 Melamud R, Hopcroft M, Jha C, Kim B, Chandorkar S, Candler R, Kenny TW. Effects of stress on the temperature coefficient of frequency in double clamped resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 392-395. DOI: 10.1109/SENSOR.2005.1496438  1
2005 Zhang L, Wang EN, Goodson KE, Kenny TW. Phase change phenomena in silicon microchannels International Journal of Heat and Mass Transfer. 48: 1572-1582. DOI: 10.1016/J.Ijheatmasstransfer.2004.09.048  1
2005 Agarwal M, Park K, Candler R, Hopcroft M, Jha C, Melamud R, Kim B, Murmann B, Kenny TW. Non-linearity cancellation in MEMS resonators for improved power-handling Technical Digest - International Electron Devices Meeting, Iedm. 2005: 286-289.  1
2005 Kim B, Candler RN, Hopcroft M, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale encapsulated MEMS resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 1965-1968.  1
2005 Park WT, O'Connor KN, Mallon JR, Maetani T, Candler RN, Ayanoor-Vitikkate V, Roberson JB, Puria S, Kenny TW. Sub-mm encapsulated accelerometers: A fully implantable sensor for cochlear implants Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 109-112.  1
2005 Park WT, Candler RN, Ayanoor-Vitikkate V, Lutz M, Partridge A, Yama G, Kenny TW. Fully encapsulated sub-millimeter accelerometers Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 347-350.  1
2004 Renuart ED, Fitzgerald AM, Kenny TW, Dauskardt RH. Fatigue crack growth in micro-machined single-crystal silicon Journal of Materials Research. 19: 2635-2640. DOI: 10.1557/Jmr.2004.0343  1
2004 Kenny TW, Liang Y, Pruitt BL, Harley JA, Bartsch M, Rudnitsky R. Fundamental noise in MEMS force sensors Proceedings of Spie - the International Society For Optical Engineering. 5472: 143-151. DOI: 10.1117/12.549814  1
2004 Wang EN, Santiago JG, Goodson KE, Kenny TW. Microjet impingement cooling with phase change American Society of Mechanical Engineers, Heat Transfer Division, (Publication) Htd. 375: 291-296. DOI: 10.1115/IMECE2004-62176  1
2004 Wang EN, Devasenathipathy S, Santiago JG, Goodson KE, Kenny TW. Nucleation and growth of vapor bubbles in a heated silicon microchannel Journal of Heat Transfer. 126: 497-498. DOI: 10.1115/1.1811716  1
2004 Wang EN, Zhang L, Jiang L, Koo JM, Maveety JG, Sanchez EA, Goodson KE, Kenny TW. Correction to "Micromachined Jets for Liquid Impingement Cooling of VLSI Chips" Journal of Microelectromechanical Systems. 13: 1072. DOI: 10.1109/Jmems.2004.840851  1
2004 Wang EN, Zhang L, Jiang L, Koo JM, Maveety JG, Sanchez EA, Goodson KE, Kenny TW. Micromachined jets for liquid impingement cooling of VLSI chips Journal of Microelectromechanical Systems. 13: 833-842. DOI: 10.1109/Jmems.2004.835768  1
2004 Pruitt BL, Park WT, Kenny TW. Measurement system for low force and small displacement contacts Journal of Microelectromechanical Systems. 13: 220-229. DOI: 10.1109/Jmems.2003.820266  1
2004 King WP, Kenny TW, Goodson KE. Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements Applied Physics Letters. 85: 2086-2088. DOI: 10.1063/1.1787160  1
2004 Burney J, Bay TJ, Brink PL, Cabrera B, Castle JP, Romani RW, Tomada A, Nam SW, Miller AJ, Martinis J, Wang E, Kenny T, Young BA. Development and characterization of a TES optical imaging array for astrophysics applications Nuclear Instruments and Methods in Physics Research, Section a: Accelerators, Spectrometers, Detectors and Associated Equipment. 520: 533-536. DOI: 10.1016/J.Nima.2003.11.307  1
2003 Herr AE, Molho JI, Drouvalakis KA, Mikkelsen JC, Utz PJ, Santiago JG, Kenny TW. On-chip coupling of isoelectric focusing and free solution electrophoresis for multidimensional separations. Analytical Chemistry. 75: 1180-7. PMID 12641239 DOI: 10.1021/Ac026239A  1
2003 Kottapalli VA, Kiremidjian AS, Lynch JP, Carryer E, Kenny TW, Law KH, Lei Y. Two-tiered wireless sensor network architecture for structural health monitoring Proceedings of Spie - the International Society For Optical Engineering. 5057: 8-19. DOI: 10.1117/12.482717  1
2003 Candler RN, Park WT, Li H, Yama G, Partridge A, Lutz M, Kenny TW. Single Wafer Encapsulation of MEMS Devices Ieee Transactions On Advanced Packaging. 26: 227-232. DOI: 10.1109/Tadvp.2003.818062  1
2003 Park WT, Candler RN, Kronmueller S, Lutz M, Partridge A, Yama G, Kenny TW. Wafer-scale film encapsulation of micromachined accelerometers Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 2: 1903-1906. DOI: 10.1109/SENSOR.2003.1217163  1
2003 Chui BW, Hishinuma Y, Budakian R, Mamin HJ, Kenny TW, Rugar D. Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 2: 1120-1123. DOI: 10.1109/SENSOR.2003.1216966  1
2003 Bartsch MS, Federle W, Full RJ, Kenny TW. Small insect measurements using a custom MEMS force sensor Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 2: 1039-1042. DOI: 10.1109/SENSOR.2003.1216946  1
2003 Candler RN, Li H, Lutz M, Park WT, Partridge A, Yama G, Kenny TW. Investigation of energy loss mechanisms in micromechanical resonators Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 332-335. DOI: 10.1109/SENSOR.2003.1215320  1
2003 Laser DJ, Myers AM, Shuhuai Yao, Bell KF, Goodson KE, Santiago JG, Kenny TW. Silicon electroosmotic micropumps for integrated circuit thermal management Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 151-154. DOI: 10.1109/SENSOR.2003.1215275  1
2003 Grade JD, Jerman H, Kenny TW. Design of large deflection electrostatic actuators Journal of Microelectromechanical Systems. 12: 335-343. DOI: 10.1109/Jmems.2003.811750  1
2003 Hishinuma Y, Geballe TH, Moyzhes BY, Kenny TW. Measurements of cooling by room-temperature thermionic emission across a nanometer gap Journal of Applied Physics. 94: 4690-4696. DOI: 10.1063/1.1606852  1
2003 Lynch JP, Partridge A, Law KH, Kenny TW, Kiremidjian AS, Carryer E. Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring Journal of Aerospace Engineering. 16: 108-114. DOI: 10.1061/(Asce)0893-1321(2003)16:3(108)  1
2003 Pruitt BL, Kenny TW. Piezoresistive cantilevers and measurement system for characterizing low force electrical contacts Sensors and Actuators, a: Physical. 104: 68-77. DOI: 10.1016/S0924-4247(02)00485-5  1
2003 Fitzgerald AM, Kenny TW, Dauskardt RH. Stress wave interference effects during fracture of silicon micromachined specimens Experimental Mechanics. 43: 317-322. DOI: 10.1007/Bf02410530  1
2003 Park WT, Cho J, Li H, Kenny TW, Candler RN, Li HJ, Partridge A, Yama G, Lutz M. Wafer scale encapsulation of MEMS devices Advances in Electronic Packaging. 1: 209-212.  1
2003 Cho ES, Koo JM, Jiang L, Prasher RS, Kim MS, Santiago JG, Kenny TW, Goodson KE. Experimental study on two-phase heat transfer in microchannel heat sinks with hotspots Annual Ieee Semiconductor Thermal Measurement and Management Symposium. 242-246.  1
2002 Autumn K, Sitti M, Liang YA, Peattie AM, Hansen WR, Sponberg S, Kenny TW, Fearing R, Israelachvili JN, Full RJ. Evidence for van der Waals adhesion in gecko setae. Proceedings of the National Academy of Sciences of the United States of America. 99: 12252-6. PMID 12198184 DOI: 10.1073/Pnas.192252799  1
2002 Fitzgerald AM, Iyer RS, Dauskardt RH, Kenny TW. Subcritical crack growth in single-crystal silicon using micromachined specimens Journal of Materials Research. 17: 683-692. DOI: 10.1557/Jmr.2002.0097  0.72
2002 Kenny TW, Candler RN, Li HJ, Park WT, Cho J, Li H, Partridge A, Yama G, Lutz M. An integrated wafer-scale packaging process for MEMS American Society of Mechanical Engineers, Electronic and Photonic Packaging, Epp. 2: 51-54. DOI: 10.1115/IMECE2002-39270  1
2002 Jiang L, Mikkelsen J, Koo J, Huber D, Yao S, Zhang L, Zhou P, Maveety JG, Prasher R, Santiago JG, Kenny TW, Goodson KE. Closed-loop electroosmotic microchannel cooling system for VLSI circuits Ieee Transactions On Components and Packaging Technologies. 25: 347-355. DOI: 10.1109/Tcapt.2002.800599  0.84
2002 Chow EM, Chandrasekaran V, Partridge A, Nishida T, Sheplak M, Quate CF, Kenny TW. Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates Journal of Microelectromechanical Systems. 11: 631-640. DOI: 10.1109/Jmems.2002.805206  1
2002 King WP, Kenny TW, Goodson KE, Cross GLW, Despont M, Dürig UT, Rothuizen H, Binnig G, Vettiger P. Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation Journal of Microelectromechanical Systems. 11: 765-774. DOI: 10.1109/Jmems.2002.803283  1
2002 Zhang L, Koo J, Jiang L, Asheghi M, Goodson KE, Santiago JG, Kenny TW. Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions Ieee\/Asme Journal of Microelectromechanical Systems. 11: 12-19. DOI: 10.1109/84.982858  0.84
2002 Hishinuma Y, Moyzhes BY, Geballe TH, Kenny TW. Vacuum thermionic refrigeration with a semiconductor heterojunction structure Applied Physics Letters. 81: 4242-4244. DOI: 10.1063/1.1523653  1
2002 Chow EM, Yaralioglu GG, Quate CF, Kenny TW. Characterization of a two-dimensional cantilever array with through-wafer electrical interconnects Applied Physics Letters. 80: 664-666. DOI: 10.1063/1.1435804  1
2002 Koo JM, Im S, Cho ES, Prasher RS, Wang E, Jiang L, Bari A, Campion D, Fogg D, Kim MS, Kenny TW, Santiago JG, Goodson KE. VLSI hotspot cooling using two-phase microchannel convection American Society of Mechanical Engineers, Process Industries Division (Publication) Pid. 7: 13-19.  1
2001 Stipe BC, Mamin HJ, Yannoni CS, Stowe TD, Kenny TW, Rugar D. Electron spin relaxation near a micron-size ferromagnet. Physical Review Letters. 87: 277602. PMID 11800915 DOI: 10.1103/Physrevlett.87.277602  1
2001 Stipe BC, Mamin HJ, Stowe TD, Kenny TW, Rugar D. Noncontact friction and force fluctuations between closely spaced bodies. Physical Review Letters. 87: 096801. PMID 11531586 DOI: 10.1103/Physrevlett.87.096801  1
2001 Stipe BC, Mamin HJ, Stowe TD, Kenny TW, Rugar D. Magnetic dissipation and fluctuations in individual nanomagnets measured by ultrasensitive cantilever magnetometry. Physical Review Letters. 86: 2874-7. PMID 11290061 DOI: 10.1103/PhysRevLett.86.2874  1
2001 Renuart ED, Fitzgerald AM, Kenny TW, Dauskardt RH. Fatigue Processes in Silicon MEMS Devices Mrs Proceedings. 682. DOI: 10.1557/Proc-682-N4.8  0.72
2001 Kenny T. Nanometer-scale force sensing with MEMS devices Ieee Sensors Journal. 1: 148-157. DOI: 10.1109/Jsen.2001.936932  0.56
2001 Harley JA, Kenny TW. A high-stiffness axial resonant probe for atomic force microscopy Journal of Microelectromechanical Systems. 10: 434-441. DOI: 10.1109/84.946802  1
2001 Liu C, Kenny TW. A high-precision, wide-bandwidth micromachined tunneling accelerometer Ieee\/Asme Journal of Microelectromechanical Systems. 10: 425-433. DOI: 10.1109/84.946800  0.96
2001 Hishinuma Y, Geballe TH, Moyzhes BY, Kenny TW. Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design Applied Physics Letters. 78: 2572-2574. DOI: 10.1063/1.1365944  1
2001 King WP, Kenny TW, Goodson KE, Cross G, Despont M, Dürig U, Rothuizen H, Binnig GK, Vettiger P. Atomic force microscope cantilevers for combined thermomechanical data writing and reading Applied Physics Letters. 78: 1300-1302. DOI: 10.1063/1.1351846  1
2001 Molho JI, Herr AE, Mosier BP, Santiago JG, Kenny TW, Brennen RA, Gordon GB, Mohammadi B. Optimization of turn geometries for microchip electrophoresis Analytical Chemistry. 73: 1350-1360. DOI: 10.1021/Ac001127+  1
2001 Rugar D, Stipe BC, Mamin HJ, Yannoni CS, Stowe TD, Yasumura KY, Kenny TW. Adventures in attonewton force detection Applied Physics a: Materials Science and Processing. 72: S3-S10. DOI: 10.1007/S003390100729  1
2000 Autumn K, Liang YA, Hsieh ST, Zesch W, Chan WP, Kenny TW, Fearing R, Full RJ. Adhesive force of a single gecko foot-hair. Nature. 405: 681-5. PMID 10864324 DOI: 10.1038/35015073  1
2000 Herr AE, Molho JI, Santiago JG, Mungal MG, Kenny TW, Garguilo MG. Electroosmotic capillary flow with nonuniform zeta potential Analytical Chemistry. 72: 1053-7. PMID 10739211 DOI: 10.1021/ac990489i  1
2000 Harley JA, Kenny TW. 1/f noise considerations for the design and process optimization of piezoresistive cantilevers Journal of Microelectromechanical Systems. 9: 226-235. DOI: 10.1109/84.846703  1
2000 Yasumura KY, Stowe TD, Chow EM, Pfafman T, Kenny TW, Stipe BC, Rugar D. Quality factors in micron- and submicron-thick cantilevers Journal of Microelectromechanical Systems. 9: 117-125. DOI: 10.1109/84.825786  1
2000 Partridge A, Reynolds JK, Chui BW, Chow EM, Fitzgerald AM, Zhang L, Maluf NI, Kenny TW. High-performance planar piezoresistive accelerometer Journal of Microelectromechanical Systems. 9: 58-66. DOI: 10.1109/84.825778  1
2000 Rudnitsky RG, Chow EM, Kenny TW. Rapid biochemical detection and differentiation with magnetic force microscope cantilever arrays Sensors and Actuators, a: Physical. 83: 256-262. DOI: 10.1016/S0924-4247(99)00393-3  1
2000 Fitzgerald AM, Dauskardt RH, Kenny TW. Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon Sensors and Actuators, a: Physical. 83: 194-199. DOI: 10.1016/S0924-4247(99)00383-0  1
2000 Chow EM, Soh HT, Lee HC, Adams JD, Minne SC, Yaralioglu G, Atalar A, Quate CF, Kenny TW. Integration of through-wafer interconnects with a two-dimensional cantilever array Sensors and Actuators, a: Physical. 83: 118-123. DOI: 10.1016/S0924-4247(99)00381-7  1
2000 Dilella D, Whitman LJ, Colton RJ, Kenny TW, Kaiser WJ, Vote EC, Podosek JA, Miller LM. Micromachined magnetic-field sensor based on an electron tunneling displacement transducer Sensors and Actuators, a: Physical. 86: 8-20. DOI: 10.1016/S0924-4247(00)00303-4  1
2000 Reynolds JK, Catling D, Blue RC, Maluf NI, Kenny T. Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range Sensors and Actuators a-Physical. 83: 142-149. DOI: 10.1016/S0924-4247(00)00294-6  0.72
1999 Fitzgerald AM, Dauskardt RH, Kenny TW. High-Resolution Measurement of Crack Growth in Micro-Machined Crystal Silicon Mrs Proceedings. 605: 43. DOI: 10.1557/Proc-605-43  0.72
1999 Partridge A, Reynolds JK, Grade JD, Kane BJ, Maluf NI, Kovacs GTA, Kenny TW. Integrated controller for tunnel sensors Ieee Journal of Solid-State Circuits. 34: 1099-1107. DOI: 10.1109/4.777108  1
1999 Chui BW, Asheghi M, Ju YS, Goodson KE, Kenny TW, Mamin HJ. Intrinsic-Carrier Thermal Runaway In Silicon Microcantilevers Microscale Thermophysical Engineering. 3: 217-228. DOI: 10.1080/108939599199765  0.84
1999 Stowe TD, Kenny TW, Thomson DJ, Rugar D. Silicon dopant imaging by dissipation force microscopy Applied Physics Letters. 75: 2785-2787. DOI: 10.1063/1.125149  0.52
1999 Harley JA, Kenny TW. High-sensitivity piezoresistive cantilevers under 1000 Å thick Applied Physics Letters. 75: 289-291. DOI: 10.1063/1.124350  1
1998 Deshpande M, Ghaddar C, Gilbert JR, John PMS, Woudenberg T, Connell C, Molho J, Herr A, Mungal G, Kenny T. Numerical framework for the modeling of electrokinetic flows Proceedings of Spie - the International Society For Optical Engineering. 3515: 217-227. DOI: 10.1117/12.322088  1
1998 Liu CH, Barzilai AM, Reynolds JK, Partridge A, Kenny TW, Grade JD, Rockstad HK. Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution Journal of Microelectromechanical Systems. 7: 235-243. DOI: 10.1109/84.679388  1
1998 Chui BW, Stowe TD, Ju YS, Goodson KE, Kenny TW, Mamin HJ, Terris BD, Ried RP, Rugar D. Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage Journal of Microelectromechanical Systems. 7: 69-77. DOI: 10.1109/84.661386  1
1998 Chui BW, Kenny TW, Mamin HJ, Terris BD, Rugar D. Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever Applied Physics Letters. 72: 1388-1390. DOI: 10.1063/1.121064  1
1998 Barzilai A, VanZandt T, Kenny T. Technique for measurement of the noise of a sensor in the presence of large background signals Review of Scientific Instruments. 69: 2767-2772. DOI: 10.1063/1.1149013  0.56
1997 Grade J, Barzilai A, Reynolds JK, Liu C, Partridge A, Jerman H, Kenny T. Wafer-scale processing, assembly, and testing of tunneling infrared detectors Sensors. 2: 1241-1244. DOI: 10.1109/Sensor.1997.635453  0.96
1997 Chui BW, Mamin HJ, Terris BD, Rugar D, Goodson KE, Kenny TW. Micromachined heaters with 1-/spl mu/s thermal time constants for AFM thermomechanical data storage Sensors. 2: 1085-1088. DOI: 10.1109/Sensor.1997.635387  0.84
1997 Grade J, Barzilai A, Reynolds JK, Liu C, Partridge A, Miller LM, Podosek JA, Kenny T. Low frequency drift in tunnel sensors Sensors. 2: 871-874. DOI: 10.1109/Sensor.1997.635240  0.96
1997 Scheeper PR, Reynolds JK, Kenny TW. Development of a modal analysis accelerometer based on a tunneling displacement transducer Sensors. 2: 867-870. DOI: 10.1109/Sensor.1997.635239  0.72
1997 Liu CH, Grade JD, Barzilai AM, Reynolds JK, Partridge A, Rockstad HK, Kenny TW. Characterization of a high-sensitivity micromachined tunneling accelerometer Sensors. 1: 471-472. DOI: 10.1109/Sensor.1997.613688  0.88
1997 Stowe T, Yasumura K, Pfafman T, Kenny T, Botkin R, Rugar D. Torsional force probes optimized for higher order mode suppression Sensors. 1: 141-144. DOI: 10.1109/Sensor.1997.613602  0.56
1997 Stowe TD, Yasumura K, Kenny TW, Botkin D, Wago K, Rugar D. Attonewton force detection using ultrathin silicon cantilevers Applied Physics Letters. 71: 288-290. DOI: 10.1063/1.119522  0.52
1997 Brennen RA, Hecht MH, Wiberg DV, Manion SJ, Bonivert WD, Hruby JM, Scholz ML, Stowe TD, Kenny TW, Jackson KH, Malek CK. Fabrication of collimating grids for an x-ray solar telescope using LIGA methods Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems. 3: 91-96. DOI: 10.1007/S005420050062  0.52
1996 Kenny TW, Reynolds JK, Podosek JA, Vote EC, Miller LM, Rockstad HK, Kaiser WJ. Micromachined infrared sensors using tunneling displacement transducers Review of Scientific Instruments. 67: 112-128. DOI: 10.1063/1.1146559  0.72
1996 Rockstad HK, Tang TK, Reynolds JK, Kenny TW, Kaiser WJ, Gabrielson TB. A miniature, high-sensitivity, electron tunneling accelerometer Sensors and Actuators a-Physical. 53: 227-231. DOI: 10.1016/0924-4247(96)01128-4  0.72
1995 Brennen RA, Hecht MH, Wiberg DV, Manion S, Bonivert WD, Hruby JM, Scholz ML, Stowe TD, Kenny TW, Jackson KH, Malek CGK. Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques Proceedings of Spie. 2640: 214-225. DOI: 10.1117/12.222650  0.52
1994 Stalder RE, Boumsellek S, Van Zandt TR, Kenny TW, Hecht MH, Grunthaner FE. Micromachined array of electrostatic energy analyzers for charged particles Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 12: 2554-2558. DOI: 10.1116/1.579056  1
1994 Kenny TW, Kaiser WJ, Rockstad HK, Reynolds JK, Podosek JA, Vote EC. Wide-bandwidth electromechanical actuators for tunneling displacement transducers Ieee\/Asme Journal of Microelectromechanical Systems. 3: 97-104. DOI: 10.1109/84.311559  0.72
1994 Rockstad HK, Kenny TW, Reynolds JK, Kaiser WJ, Gabrielson TB. A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers Sensors and Actuators: a. Physical. 43: 107-114. DOI: 10.1016/0924-4247(93)00676-U  1
1994 Varsi G, Chrisp M, Jones R, Van Zandt T, Kenny T, Kaiser W, Banerdt W, Hui E, Crisp D. Microinstruments and microsensors for space science Acta Astronautica. 32: 705-713. DOI: 10.1016/0094-5765(94)90181-3  1
1993 Miller LM, Agronin ML, Bartman RK, Kaiser WJ, Kenny TW, Norton RL, Vote EC. Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications Proceedings of Spie. 1945: 421-430. DOI: 10.1117/12.158786  0.56
1993 Kenny TW, Kaiser WJ, Podosek JA, Rockstad HK, Reynolds JK, Vote EC. Micromachined tunneling displacement transducers for physical sensors Journal of Vacuum Science and Technology. 11: 797-802. DOI: 10.1116/1.578351  0.72
1992 Kenny TW, Kaiser WJ, Rockstad HK, Reynolds JK. Electron tunneling sensors Journal of the Acoustical Society of America. 92: 2355-2355. DOI: 10.1121/1.404920  0.72
1992 VanZandt TR, Kenny TW, Kaiser WJ. Novel position sensor technologies for microaccelerometers Proceedings of Spie. 1694: 165-172. DOI: 10.1117/12.138118  0.32
1992 Kenny TW, Kaiser WJ, Reynolds JK, Podosek JA, Rockstad HK, Vote EC, Waltman SB. Electron Tunnel Sensors Journal of Vacuum Science and Technology. 10: 2114-2118. DOI: 10.1116/1.577991  0.72
1991 Kenny TW, Kaiser WJ, Waltman SB, Reynolds JK. Novel infrared detector based on a tunneling displacement transducer Applied Physics Letters. 59: 1820-1822. DOI: 10.1063/1.106209  0.72
1991 Kenny TW, Waltman SB, Reynolds JK, Kaiser WJ. Micromachined silicon tunnel sensor for motion detection Applied Physics Letters. 58: 100-102. DOI: 10.1063/1.104432  0.72
1990 Kenny TW, Richards PL. Heat capacity and sticking probability measurements of 4He submonolayers adsorbed on evaporated Ag films: Bose statistics in two dimensions. Physical Review Letters. 64: 2386-2389. PMID 10041699 DOI: 10.1103/PhysRevLett.64.2386  1
1989 Kenny TW, Richards PL, Park IS, Haller EE, Beeman JW. Bias-induced nonlinearities in the dc I-V characteristics of neutron-transmutation-doped germanium at liquid-4He temperatures. Physical Review. B, Condensed Matter. 39: 8476-8482. PMID 9947561 DOI: 10.1103/Physrevb.39.8476  1
Show low-probability matches.