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Rinku P. Parikh, Ph.D. - Publications

Affiliations: 
2006 University of Maryland, College Park, College Park, MD 
Area:
Chemical Engineering
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7 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2009 Oliver JD, Ponczak BH, Parikh RP, Adomaitis RA. Uniformity improvement of planetary epitaxial growth processes through analysis of intentionally stalled SiC wafers Materials Science Forum. 615: 101-104. DOI: 10.4028/Www.Scientific.Net/Msf.615-617.101  0.613
2007 Parikh RP, Adomaitis RA, Oliver JD, Ponczak BH. Implementation of a geometrically based criterion for film uniformity control in a planetary SiC CVD reactor system Journal of Process Control. 17: 477-488. DOI: 10.1016/J.Jprocont.2006.04.004  0.647
2006 Parikh RP, Adomaitis RA, Aumer ME, Partlow DP, Thomson DB, Rubloff GW. Validating gallium nitride growth kinetics using a precursor delivery showerhead as a novel chemical reactor Journal of Crystal Growth. 296: 15-26. DOI: 10.1016/J.Jcrysgro.2006.07.031  0.682
2006 Parikh RP, Adomaitis RA. An overview of gallium nitride growth chemistry and its effect on reactor design: Application to a planetary radial-flow CVD system Journal of Crystal Growth. 286: 259-278. DOI: 10.1016/J.Jcrysgro.2005.09.050  0.674
2005 Cho S, Rubloff GW, Aumer ME, Thomson DB, Partlow DP, Parikh R, Adomaitis RA. In situ chemical sensing in AlGaNGaN high electron mobility transistor metalorganic chemical vapor deposition process for real-time prediction of product crystal quality and advanced process control Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23: 1386-1397. DOI: 10.1116/1.1993616  0.64
2005 Parikh RP, Adomaitis RA. Application of a geometrically-based uniformity criterion for film uniformity optimization in a planetary gallium nitride CVD system Aiche Annual Meeting, Conference Proceedings. 6749-6759.  0.702
2005 Parikh RP, Adomaitis RA, Rubloff GW, Robertson E, Partlow D, Thomson D, Aumer M. Gallium nitride thin film growth chemistry modeling and experimental validation within a Movpe reactor showerhead system Aiche Annual Meeting, Conference Proceedings. 5572.  0.697
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