| Year |
Citation |
Score |
| 2004 |
Pai RA, Humayun R, Schulberg MT, Sengupta A, Sun JN, Watkins JJ. Mesoporous silicates prepared using preorganized templates in supercritical fluids. Science (New York, N.Y.). 303: 507-10. PMID 14739454 DOI: 10.1126/Science.1092627 |
0.379 |
|
| 2004 |
Li S, Sun J, Li Z, Peng H, Gidley D, Ryan ET, Yan Y. Evaluation of Pore Structure in Pure Silica Zeolite MFI Low-k Thin Films Using Positronium Annihilation Lifetime Spectroscopy Journal of Physical Chemistry B. 108: 11689-11692. DOI: 10.1021/Jp048707L |
0.491 |
|
| 2003 |
Harkness BR, Boisvert R, Deng Q, Zhong B, Sun J, Gidley D. Accelerated Oxidation of Hydrogen Silsesquioxane Thin Films Facilitated by an Organosilicone Resin Additive Mrs Proceedings. 766. DOI: 10.1557/PROC-766-E6.4 |
0.335 |
|
| 2003 |
Ryan ET, Freeman M, Svedberg L, Lee J, Guenther T, Connor J, Yu K, Sun J, Gidley DW. A Study of Atomic Layer Deposition and Reactive Plasma Compatibilitywith Mesoporous Organosilicate Glass Films Mrs Proceedings. 766. DOI: 10.1557/PROC-766-E10.8 |
0.416 |
|
| 2003 |
Sun JN, Hu Y, Frieze WE, Chen W, Gidley DW. How pore size and surface roughness affect diffusion barrier continuity on porous low-k films Journal of the Electrochemical Society. 150. DOI: 10.1149/1.1565140 |
0.512 |
|
| 2003 |
Yang S, Mirau P, Sun J, Gidley DW. Characterization of nanoporous ultra low-k thin films templated by copolymers with different architectures Radiation Physics and Chemistry. 68: 351-356. DOI: 10.1016/S0969-806X(03)00183-X |
0.425 |
|
| 2002 |
Sun JN, Gidley DW, Hu Y, Frieze WE, Ryan ET. Depth-profiling plasma-induced densification of porous low-k thin films using positronium annihilation lifetime spectroscopy Applied Physics Letters. 81: 1447-1449. DOI: 10.1063/1.1501767 |
0.462 |
|
| 2001 |
Lin S, Sun J, Gidley DW, Wetzel JT, Monnig K, Ryan ET, Jang S, Yu D, Liang M. Positron Annihilation Lifetime Spectroscopy (Pals) Application in Metal Barrier Layer Integrity for Porous Low-K Materials Mrs Proceedings. 686. DOI: 10.1557/Proc-686-A9.7 |
0.364 |
|
| 2001 |
Ryan ET, Martin J, Junker K, Wetzel J, Gidley DW, Sun J. Effect of material properties on integration damage in organosilicate glass films Journal of Materials Research. 16: 3335-3338. DOI: 10.1557/Jmr.2001.0458 |
0.49 |
|
| 2001 |
Sun JN, Gidley DW, Dull TL, Frieze WE, Yee AF, Ryan ET, Lin S, Wetzel J. Probing diffusion barrier integrity on porous silica low-k thin films using positron annihilation lifetime spectroscopy Journal of Applied Physics. 89: 5138-5144. DOI: 10.1063/1.1360704 |
0.516 |
|
| 2001 |
Yang S, Mirau PA, Pai CS, Naiamasu O, Reichmanis E, Lin EK, Lee HJ, Gidley DW, Sun J. Molecular templating of nanoporous ultralow dielectric constant (≈1.5) organosilicates by tailoring the microphase separation of triblock copolymers Chemistry of Materials. 13: 2762-2764. DOI: 10.1021/Cm0102786 |
0.338 |
|
| 2000 |
Gidley DW, Frieze WE, Dull TL, Sun J, Yee AF, Nguyen CV, Yoon DY. Determination of pore-size distribution in low-dielectric thin films Applied Physics Letters. 76: 1282-1284. DOI: 10.1063/1.126009 |
0.478 |
|
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