Dojun Kim, Ph.D.
Affiliations: | University of Florida, Gainesville, Gainesville, FL, United States |
Area:
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"Dojun Kim"Mean distance: 14.47 | S | N | B | C | P |
Parents
Sign in to add mentor| Timothy James Anderson | grad student | 2009 | UF Gainesville | |
| (Chemical vapor deposition of tungsten-based diffusion barrier thin films for copper metallization.) | ||||
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Publications
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| Lee J, Kim D, Kim OH, et al. (2012) Experimental and computational studies of the homogeneous thermal decomposition of the tungsten dimethylhydrazido complexes Cl 4(RCN) W(NNMe 2) Journal of the Electrochemical Society. 159: H545-H553 |
| Kim D, Hyun Kim O, Ajmera HM, et al. (2011) Deposition of WNxCy from the tungsten piperidylhydrazido complex Cl4(CH3CN)W(N-pip) as a single-source precursor Journal of the Electrochemical Society. 158: H618-H625 |
| Kim D, Kim OH, Anderson T, et al. (2009) Chemical vapor deposition of WNxCy using the tungsten piperidylhydrazido complex Cl4(CH3CN)W(N-pip): Deposition, characterization, and diffusion barrier evaluation Journal of Vacuum Science and Technology. 27: 943-950 |
| Kim OH, Kim D, Anderson T. (2009) Atomic layer deposition of GaN using GaCl3 and NH3 Journal of Vacuum Science and Technology. 27: 923-928 |