Charles A. Jones, Ph.D.
Affiliations: | 2004 | University of North Carolina, Chapel Hill, Chapel Hill, NC |
Area:
Cancer NanotechnologyGoogle:
"Charles Jones"Mean distance: 9.17
Parents
Sign in to add mentorJoseph M. DeSimone | grad student | 2004 | UNC Chapel Hill | |
(Etching of silicon dioxide thin films and synthesis of novolac resins in supercritical carbon dioxide.) |
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Publications
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Li YX, Yang D, Jones CA, et al. (2007) Etching Si O2 with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25: 1139-1142 |
Jones CA, Zweber A, DeYoung JP, et al. (2004) Applications of "dry" processing in the microelectronics industry using carbon dioxide Critical Reviews in Solid State and Materials Sciences. 29: 97-109 |
Jones CA, Yang D, Irene EA, et al. (2003) HF etchant solutions in supercritical carbon dioxide for "dry" etch processing of microelectronic devices Chemistry of Materials. 15: 2867-2869 |