Pamela M. Visintin, Ph.D.
Affiliations: | 2004 | University of North Carolina, Chapel Hill, Chapel Hill, NC |
Area:
Cancer NanotechnologyGoogle:
"Pamela Visintin"Mean distance: 9.17
Parents
Sign in to add mentor| Joseph M. DeSimone | grad student | 2004 | UNC Chapel Hill | |
| (Slurry design towards a "dry" carbon dioxide-based copper chemical mechanical planarization process for device fabrication.) | ||||
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Publications
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| Visintin PM, Eichenlaub SK, Portnow LE, et al. (2006) Studies on CO 2-based slurries and fluorinated silica and alumina particles for chemical mechanical polishing of copper films Journal of the Electrochemical Society. 153: G1064-G1071 |
| Visintin PM, Korzenski MB, Baum TH. (2006) Liquid clean formulations for stripping high-dose ion-implanted photoresist from microelectronic devices Journal of the Electrochemical Society. 153: G591-G597 |
| Visintin PM, Carbonell RG, Schauer CK, et al. (2005) Chemical functionalization of silica and alumina particles for dispersion in carbon dioxide. Langmuir : the Acs Journal of Surfaces and Colloids. 21: 4816-23 |
| Visintin PM, Bessel CA, White PS, et al. (2005) Oxidative dissolution of copper and zinc metal in carbon dioxide with tert-butyl peracetate and a beta-diketone chelating agent. Inorganic Chemistry. 44: 316-24 |
| Bessel CA, Denison GM, DeSimone JM, et al. (2003) Etchant solutions for the removal of Cu(0) in a supercritical CO2-based "dry" chemical mechanical planarization process for device fabrication. Journal of the American Chemical Society. 125: 4980-1 |
| Denison GM, Visintin PM, DeSimone JM, et al. (2003) Copper chemical mechanical planarization processes in carbon dioxide Proceedings - Electrochemical Society. 21: 76-82 |