Lieve G. Teugels, Ph.D.
Affiliations: | 2009 | Chemistry | University of Chicago, Chicago, IL |
Area:
surface chemistry and catalysis, surface physics, and materials research, thin film polymer dynamics and AFM imaging studies of bacterial cell wall structureGoogle:
"Lieve Teugels"Mean distance: 9.44
Parents
Sign in to add mentor| Steven J. Sibener | grad student | 2009 | Chicago | |
| (Scanning tunneling microscopy studies of supramolecular assemblies of porphyrins and carbon-60 fullerenes.) | ||||
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Publications
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| Choi I, Kim H, Yerriboina NP, et al. (2019) Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications Ecs Journal of Solid State Science and Technology. 8: 3028 |
| Lieten RR, White D, Parson T, et al. (2016) Post-CMP Cleaners for Tungsten at Advanced Nodes Solid State Phenomena. 255: 186-194 |
| Sagi KV, Amanapu HP, Teugels LG, et al. (2014) Investigation of guanidine carbonate-based slurries for chemical mechanical polishing of ru/tin barrier films with minimal corrosion Ecs Journal of Solid State Science and Technology. 3: P227-P234 |
| Turk MC, Rock SE, Amanapu HP, et al. (2013) Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium Ecs Journal of Solid State Science and Technology. 2: P205-P213 |