Martin K. Erhardt, Ph.D.
Affiliations: | 2001 | University of Illinois, Urbana-Champaign, Urbana-Champaign, IL |
Area:
Materials ResearchGoogle:
"Martin Erhardt"Mean distance: 7.81 | S | N | B | C | P |
Parents
Sign in to add mentor| Ralph G. Nuzzo | grad student | 2001 | UIUC | |
| (Additive fabrication and soft -lithographic patterning of microelectronic devices.) | ||||
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Publications
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| Jin HC, Abelson JR, Erhardt MK, et al. (2004) Soft lithographic fabrication of an image sensor array on a curved substrate Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 2548-2551 |
| Erhardt MK, Nuzzo RG. (2001) Driven pattern formation in organic thin film materials: Complex mesoscopic organization in microcontact printing on Si/SiO2 via the spontaneous dewetting of a functionalized perfluoropolyether ink Journal of Physical Chemistry B. 105: 8776-8784 |
| Erhardt MK, Jin HC, Abelson JR, et al. (2000) Low-temperature fabrication of Si thin-film transistor microstructures by soft lithographic patterning on curved and planar substrates Chemistry of Materials. 12: 3306-3315 |
| Erhardt MK, Nuzzo RG. (1999) Fabrication of Pt-Si Schottky diodes using soft lithographic patterning and selective chemical vapor deposition Langmuir. 15: 2188-2193 |
| Jeon NL, Hu J, Whitesides GM, et al. (1998) Fabrication of silicon MOSFETs using soft lithography Advanced Materials. 10: 1466-1469 |
| Jeon NL, Lin W, Erhardt MK, et al. (1997) Selective chemical vapor deposition of platinum and palladium directed by monolayers patterned using microcontact printing Langmuir. 13: 3833-3838 |