Stephen T. Meyers, Ph.D.

Affiliations: 
2008 Oregon State University, Corvallis, OR 
Area:
materials chemistry
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Doug Keszler grad student 2008 Oregon State
 (Aqueous chemistries for oxide electronics.)
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Publications

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Simone DD, Mao M, Kocsis M, et al. (2016) Demonstration of an N7 integrated fab process for metal oxide EUV photoresist Proceedings of Spie. 9776
Stowers J, Anderson J, Cardineau B, et al. (2016) Metal oxide EUV photoresist performance for N7 relevant patterns and processes Proceedings of Spie - the International Society For Optical Engineering. 9779
Grenville A, Anderson JT, Clark BL, et al. (2015) Integrated fab process for metal oxide EUV photoresist Proceedings of Spie - the International Society For Optical Engineering. 9425
Jiang K, Meyers ST, Anderson MD, et al. (2013) Functional ultrathin films and nanolaminates from aqueous solutions Chemistry of Materials. 25: 210-214
Teki R, John Kadaksham A, House M, et al. (2012) Alternative smoothing techniques to mitigate EUV substrate defectivity Proceedings of Spie - the International Society For Optical Engineering. 8322
Kim KM, Kim CW, Heo JS, et al. (2011) Competitive device performance of low-temperature and all-solution- processed metal-oxide thin-film transistors Applied Physics Letters. 99
Weiss DN, Yuan HC, Lee BG, et al. (2010) Nanoimprinting for diffractive light trapping in solar cells Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28: C6M98-C6M103
Weiss DN, Meyers ST, Keszler DA. (2010) All-inorganic thermal nanoimprint process Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28: 823-828
Heo JS, Kim J, Choi S, et al. (2010) 17.4L: Late-news paper: Contact resistance and process integration effects on high-performance oxide TFTs with solution-deposited semiconductor and gate dielectric layers 48th Annual Sid Symposium, Seminar, and Exhibition 2010, Display Week 2010. 1: 241-244
Heo JS, Kim J, Choi S, et al. (2010) 17.4L: Late-news paper: Contact resistance and process integration effects on high-performance oxide TFTs with solution-deposited semiconductor and gate dielectric layers 48th Annual Sid Symposium, Seminar, and Exhibition 2010, Display Week 2010. 1: 241-244
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