Deepika Priyadarshini, Ph.D.
Affiliations: | 2011 | Carnegie Mellon University, Pittsburgh, PA |
Area:
surface chemistryGoogle:
"Deepika Priyadarshini"Mean distance: 9.22 | S | N | B | C | P |
Parents
Sign in to add mentorAndrew J. Gellman | grad student | 2011 | Carnegie Mellon | |
(High-throughput Characterization of Surface Segregation in Copper Palladium Alloys.) |
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Publications
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Priyadarshini D, Nguyen SV, Shobha H, et al. (2017) Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35: 21201 |
Murray CE, Priyadarshini D, Nguyen S, et al. (2016) Tailoring capping layers to reduce stress gradients in copper metallization Applied Physics Letters. 109: 231907 |
Murray CE, Jordan-Sweet J, Priyadarshini D, et al. (2015) Linking strain anisotropy and plasticity in copper metallization Applied Physics Letters. 106 |
Batra P, Skordas S, LaTulipe D, et al. (2014) Three-dimensional wafer stacking using Cu TSV integrated with 45 nm high performance SOI-CMOS embedded DRAM technology Journal of Low Power Electronics and Applications. 4: 77-89 |
Priyadarshini D, Nguyen S, Shobha H, et al. (2014) Advanced metal and dielectric barrier cap films for Cu low k interconnects 2014 Ieee International Interconnect Technology Conference / Advanced Metallization Conference, Iitc/Amc 2014. 185-188 |
Grill A, Gates SM, Ryan TE, et al. (2014) Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects - State of the art Applied Physics Reviews. 1 |
Priyadarshini D, Kondratyuk P, Miller JB, et al. (2012) Compact tool for deposition of composition spread alloy films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 30 |
Miller JB, Priyadarshini D, Gellman AJ. (2012) Segregation at the surfaces of Cu xPd 1 - X alloys in the presence of adsorbed S Surface Science. 606: 1520-1526 |
Priyadarshini D, Kondratyuk P, Picard YN, et al. (2011) High-throughput characterization of surface segregation in Cu xPd1-x alloys Journal of Physical Chemistry C. 115: 10155-10163 |
Gellman AJ, Miller JB, Priyadarshini D. (2008) High throughput methodology for study of surface segregation Aiche Annual Meeting, Conference Proceedings |