Todd C. Bailey, Ph.D.
Affiliations: | 2003 | University of Texas at Austin, Austin, Texas, U.S.A. |
Area:
design and synthesis of functional organic materialsGoogle:
"Todd Bailey"Mean distance: 8.45 | S | N | B | C | P |
Parents
Sign in to add mentor| C. Grant Willson | grad student | 2003 | UT Austin | |
| (Imprint template advances and surface modification, and defect analysis for step and flash imprint lithography.) | ||||
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Publications
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| Okai N, Lavigne E, Hitomi K, et al. (2015) Methodology for determining CD-SEM measurement condition of sub-20nm resist patterns for 0.33NA EUV lithography Proceedings of Spie - the International Society For Optical Engineering. 9424 |
| Sarma C, Bailey T, Lyons A, et al. (2011) 3-D lithography modeling for ground rule development Proceedings of Spie - the International Society For Optical Engineering. 7973 |
| Wu K, Bailey TC, Willson CG, et al. (2005) Surface hydration and its effect on fluorinated SAM formation on SiO2 surfaces. Langmuir : the Acs Journal of Surfaces and Colloids. 21: 11795-801 |
| Resnick DJ, Dauksher WJ, Mancini D, et al. (2003) Imprint lithography: Lab curiosity or the real NGL? Proceedings of Spie - the International Society For Optical Engineering. 5037: 12-23 |
| Johnson SC, Bailey TC, Dickey MD, et al. (2003) Advances in step and flash imprint lithography Proceedings of Spie - the International Society For Optical Engineering. 5037: 197-202 |
| Chang CH, Heilmann RK, Fleming RC, et al. (2003) Fabrication of sawtooth diffraction gratings using nanoimprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 2755-2759 |
| Resnick DJ, Dauksher WJ, Mancini D, et al. (2003) Imprint lithography for integrated circuit fabrication Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 2624-2631 |
| Resnick DJ, Mancini D, Dauksher WJ, et al. (2003) Improved step and flash imprint lithography templates for nanofabrication Microelectronic Engineering. 69: 412-419 |
| Johnson S, Resnick DJ, Mancini D, et al. (2003) Fabrication of multi-tiered structures on step and flash imprint lithography templates Microelectronic Engineering. 67: 221-228 |
| Bailey TC, Johnson SC, Sreenivasan SV, et al. (2002) Step and flash imprint lithography: An efficient nanoscale printing technology Journal of Photopolymer Science and Technology. 15: 481-486 |