Jason E. Meiring, Ph.D.

Affiliations: 
2005 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
design and synthesis of functional organic materials
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C. Grant Willson grad student 2005 UT Austin
 (Mesoscale simulation of the photoresist process and hydrogel biosensor array platform indexed by shape.)
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Publications

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Hamieh B, Choi HC, Erenturk B, et al. (2013) Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization Proceedings of Spie - the International Society For Optical Engineering. 8683
Landie G, Xu Y, Burns S, et al. (2011) Fundamental investigation of Negative Tone Development (NTD) for the 22nm node (and beyond) Proceedings of Spie - the International Society For Optical Engineering. 7972
Melville D, Rosenbluth AE, Tian K, et al. (2010) Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations Proceedings of Spie - the International Society For Optical Engineering. 7640
Kim RH, Holmes S, Halle S, et al. (2010) 22-nm-node technology active-layer patterning for planar transistor devices Journal of Micro/Nanolithography, Mems, and Moems. 9
Kim RH, Holmes S, Halle S, et al. (2009) 22 nm technology node active layer patterning for planar transistor devices Proceedings of Spie - the International Society For Optical Engineering. 7274
Meiring JE, Lee S, Costner EA, et al. (2009) Pattern recognition of shape-encoded hydrogel biosensor arrays Optical Engineering. 48
Lai K, Burns S, Halle S, et al. (2008) 32 NM Logic patterning options with immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6924
Abdo A, Stobert I, Viswanathan R, et al. (2008) The comparison of OPC performance and run time for dense versus sparse solutions Proceedings of Spie - the International Society For Optical Engineering. 6924
Lee S, Carmichael P, Meiring J, et al. (2007) Modeling of self-assembly dynamics of photolithographically patterned MUFFINS biosensor arrays Materials Research Society Symposium Proceedings. 1002: 59-65
Meiring JE, Haffner H, Fonseca C, et al. (2007) ACLV driven double-patterning decomposition with extensively added printing assist features (PrAFs) Proceedings of Spie - the International Society For Optical Engineering. 6520
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