Mark A. Nierode, Ph.D.

Affiliations: 
2005 University of California, Berkeley, Berkeley, CA 
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"Mark Nierode"
Mean distance: 4423.67
 

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David B. Graves grad student 2005 UC Berkeley
 (Modeling studies of reactor -scale, non-equilibrium, plasma discharges using FEMLAB.)
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Publications

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Hsu CC, Nierode MA, Coburn JW, et al. (2006) Comparison of model and experiment for Ar, Ar/O2 and Ar/O 2/Cl2 inductively coupled plasmas Journal of Physics D: Applied Physics. 39: 3272-3284
Postnikov SV, Stewart MD, Tran HV, et al. (1999) Study of resolution limits due to intrinsic bias in chemically amplified photoresists Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 17: 3335-3338
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