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Cheng-Che Hsu, Ph.D.

Affiliations: 
2006 University of California, Berkeley, Berkeley, CA, United States 
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"Cheng-Che Hsu"
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David B. Graves grad student 2006 UC Berkeley
 (Diagnostic studies and modeling of inductively coupled plasmas.)

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Chang YY, Glorieux B, Hsu CH, et al. (2016) Influence of ZrO2 particles on the optical properties of pc-LEDs Optical Materials. 55: 55-61
Hsu CC, Marchack N, Martin RM, et al. (2013) Feature profile evolution during shallow trench isolation etching in chlorine-based plasmas. III. the effect of oxygen addition Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 31
Chang S, Rodríguez Tolava EF, Yang Y, et al. (2013) One-Step Fast Synthesis of Li4 Ti5 O12 Particles Using an Atmospheric Pressure Plasma Jet Journal of the American Ceramic Society. 97: 708-712
Hsu CC, Hoang J, Le V, et al. (2008) Feature profile evolution during shallow trench isolation etch in chlorine-based plasmas. II. Coupling reactor and feature scale models Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26: 1919-1925
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