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Gottlieb Oehrlein

Affiliations: 
Physics University of Maryland, College Park, College Park, MD 
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"Gottlieb Oehrlein"
Mean distance: 1936
 
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Parents

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James W. Corbett grad student SUNY Albany

Children

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Marcus Doemling grad student SUNY Albany
Joseph L. Hernandez grad student SUNY Albany
Bernd E.E. Kastenmeier grad student SUNY Albany
Peter J. Matsuo grad student SUNY Albany
Neal Rueger grad student SUNY Albany
Marc Schaepkens grad student SUNY Albany
Peter Wrschka grad student SUNY Albany
Theo Standaert grad student 1999 SUNY Albany
Eric A. Joseph grad student 2000 SUNY Albany
Xuefeng Hua grad student 2005 University of Maryland
Li Ling grad student 2006 University of Maryland
Bryan Orf grad student 2006 University of Maryland
Sebastian U. Engelmann grad student 2008 University of Maryland
Robert L. Bruce grad student 2010 University of Maryland
Ming-Shu Kuo grad student 2010 University of Maryland
Florian G. Weilnboeck grad student 2011 University of Maryland
Nicholas A. Fox-Lyon grad student 2013 University of Maryland
Elliot A. J. Bartis grad student 2015 University of Maryland
Dominik Metzler grad student 2016 University of Maryland
Andrew J. Knoll grad student 2018 University of Maryland
Pingshan Luan grad student 2018 University of Maryland
Chen Li grad student 2019 University of Maryland
Adam Pranda grad student 2019 University of Maryland
Kang-yi Lin grad student 2022 University of Maryland
Yudong Li grad student 2023 University of Maryland

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Publications

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Li C, Hofmann T, Edinger K, et al. (2020) Etching of Si3N4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment Journal of Vacuum Science & Technology B. 38: 032208
Li C, Godyak V, Hofmann T, et al. (2020) Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si3N4 and Si etching Journal of Vacuum Science & Technology A. 38: 033001
Lin K, Li C, Engelmann S, et al. (2020) Selective atomic layer etching of HfO2 over silicon by precursor and substrate-dependent selective deposition Journal of Vacuum Science & Technology A. 38: 032601
Zhang S, Li Y, Knoll A, et al. (2020) Mechanistic aspects of plasma-enhanced catalytic methane decomposition by time-resolved operando diffuse reflectance infrared Fourier transform spectroscopy Journal of Physics D: Applied Physics. 53: 215201
Luan P, Oehrlein GS. (2019) Characterization of Ultrathin Polymer Films Using p-polarized ATR-FTIR and Its Comparison with XPS. Langmuir : the Acs Journal of Surfaces and Colloids
Knoll AJ, Pranda A, Lee H, et al. (2019) Substrate temperature effect on migration behavior of fluorocarbon film precursors in high-aspect ratio structures Journal of Vacuum Science & Technology B. 37: 031802
Luan P, Kondeti VSSK, Knoll AJ, et al. (2019) Effect of water vapor on plasma processing at atmospheric pressure: Polymer etching and surface modification by an Ar/H2O plasma jet Journal of Vacuum Science & Technology A. 37: 031305
Knoll AJ, Zhang S, Lai M, et al. (2019) Infrared studies of gas phase and surface processes of the enhancement of catalytic methane decomposition by low temperature plasma Journal of Physics D: Applied Physics. 52: 225201
Pranda MA, Murugesan BJ, Knoll AJ, et al. (2019) Sensitivity of tumor versus normal cell migration and morphology to cold atmospheric plasma‐treated media in varying culture conditions Plasma Processes and Polymers. 17: 1900103
Pranda A, Gutierrez Razo SA, Fourkas JT, et al. (2019) Evolution of photoresist layer structure and surface morphology under fluorocarbon‐based plasma exposure Plasma Processes and Polymers. 16: 1900026
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