Gowri Kota

Affiliations: 
1988 Chemical and Biomolecular Engineering University of California, Berkeley, Berkeley, CA 
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"Gowri Kota"
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Publications

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Kota GP, Coburn JW, Graves DB. (1999) Heterogeneous recombination of atomic bromine and fluorine Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 17: 282-290
Kota GP, Coburn JW, Graves DB. (1999) Heteronuclear and homonuclear surface abstraction reactions of Cl, Br, and F Journal of Applied Physics. 85: 74-86
Kota GP, Coburn JW, Graves DB. (1998) Role of oxygen in ion-enhanced etching of poly-Si and WSix with chlorine Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 16: 2215-2221
Kota GP, Coburn JW, Graves DB. (1998) The recombination of chlorine atoms at surfaces Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 16: 270-277
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